Bonded assembly containing oxidation barriers, hybrid bonding, or air gap, and methods of forming the same

ABSTRACT

At least one polymer material may be employed to facilitate bonding between the semiconductor dies. Plasma treatment, formation of a blended polymer, or formation of polymer hairs may be employed to enhance bonding. Alternatively, air gaps can be formed by subsequently removing the polymer material to reduce capacitive coupling between adjacent bonding pads.

RELATED APPLICATIONS

The instant application is a continuation-in-part (CIP) application ofU.S. application Ser. No. 16/523,029 filed on Jul. 26, 2019, the entirecontents of which are incorporated herein by reference.

FIELD

The present disclosure relates generally to the field of semiconductordevices, and particularly to a bonded assembly containing oxidationbarriers, adhesion enhancers, polymers, and/or air gaps formetal-to-metal or hybrid bonded wafers and methods for forming the same.

BACKGROUND

A three-dimensional memory device including three-dimensional verticalNAND strings having one bit per cell is disclosed in an article by T.Endoh et al., titled “Novel Ultra High Density Memory With AStacked-Surrounding Gate Transistor (S-SGT) Structured Cell”, IEDM Proc.(2001) 33-36.

SUMMARY

According to an aspect of the present disclosure, a bonded assembly isprovided, which comprises: a first semiconductor die comprising a firstsubstrate, first semiconductor devices, and first bonding pads that areelectrically connected to a respective node of the first semiconductordevices and laterally surrounded by a first pad-level dielectric layer,wherein the first pad-level dielectric layer comprises a stack of afirst proximal polymer material layer and a first distal polymermaterial layer having at least one of greater hydrophilicity or greatercross-linking density than first proximal polymer material layer; and asecond semiconductor die comprising a second substrate, secondsemiconductor devices, and second bonding pads that are electricallyconnected to a respective node of the second semiconductor devices andlaterally surrounded by a second pad-level dielectric layer, whereineach of the second bonding pads is bonded to a respective one of thefirst bonding pads, and the first distal polymer material layer contactsthe second pad-level dielectric layer.

According to another aspect of the present disclosure, a bonded assemblyis provided, which comprises: a first semiconductor die comprising afirst substrate, first semiconductor devices, and first bonding padsthat are electrically connected to a respective node of the firstsemiconductor devices; a second semiconductor die comprising a secondsubstrate, second semiconductor devices, and second bonding pads thatare electrically connected to a respective node of the secondsemiconductor devices; and a pad-level polymer material layer includinga blend of two miscible polymer materials laterally surrounding thefirst bonding pads and the second bonding pads.

According to yet another aspect of the present disclosure, a method offorming a bonded assembly is provided, which comprises: providing afirst semiconductor die comprising a first substrate, firstsemiconductor devices, and first bonding pads that are electricallyconnected to a respective node of the first semiconductor devices andlaterally surrounded by a first polymer material layer including a firstpolymer material; providing a second semiconductor die comprising asecond substrate, second semiconductor devices, and second bonding padsthat are electrically connected to a respective node of the secondsemiconductor devices and laterally surrounded by a second polymermaterial layer including a second polymer material, wherein the secondpolymer material is miscible with and is different from the firstpolymer material, wherein the second polymer material is miscible withthe first polymer material; bringing the first semiconductor die and thesecond semiconductor die into contact with each other such that thesecond bonding pads are disposed on a respective one of the firstbonding pads; and mixing the first polymer material and the secondpolymer material, whereby a pad-level polymer material layer including ablend of first polymer material and the second polymer material isformed.

According to still another aspect of the present disclosure, a bondedassembly is provided, which comprises: a first semiconductor diecomprising a first substrate, first semiconductor devices, and firstbonding pads that are electrically connected to a respective node of thefirst semiconductor devices and laterally surrounded by a firstpad-level dielectric layer, wherein the first pad-level dielectric layercomprises a first polymer material layer and first polymer hairsextending from a horizontal surface of the first polymer material layer,having a diameter or maximum width from 0.1 microns to 10 microns, aheight from 0.1 microns to 5 microns, and periodicity from 0.2 micronsto 10 microns; and a second semiconductor die comprising a secondsubstrate, second semiconductor devices, and second bonding pads thatare electrically connected to a respective node of the secondsemiconductor devices and laterally surrounded by a second pad-leveldielectric layer, wherein each of the second bonding pads is bonded to arespective one of the first bonding pads, and the first polymer hairscontact the second pad-level dielectric layer.

According to even another aspect of the present disclosure, a method offorming a bonded assembly is provided, which comprises: providing afirst semiconductor die comprising a first substrate, firstsemiconductor devices, and first bonding pads that are electricallyconnected to a respective node of the first semiconductor devices andlaterally surrounded by a first pad-level dielectric layer, wherein thefirst pad-level dielectric layer comprises a stack of a first pad-levelsilicon-containing dielectric layer and a first polymer material layerincluding a first polymer material; providing a second semiconductor diecomprising a second substrate, second semiconductor devices, and secondbonding pads that are electrically connected to a respective node of thesecond semiconductor devices and laterally surrounded by a secondpad-level dielectric layer; and bonding the first bonding pads to thesecond bonding pads while the first polymer material contacts the secondpad-level dielectric layer.

According to a further aspect of the present disclosure, a bondedassembly is provided, which comprises: a first semiconductor diecomprising a first substrate, first semiconductor devices, and firstbonding pads that are electrically connected to a respective node of thefirst semiconductor devices and laterally surrounded by a firstpad-level dielectric layer, wherein the first pad-level dielectric layercomprises a first distal surface that is more proximal to the firstsubstrate than distal surfaces of the first bonding pads are to thefirst substrate; and a second semiconductor die comprising a secondsubstrate, second semiconductor devices, and second bonding pads thatare electrically connected to a respective node of the secondsemiconductor devices and laterally surrounded by a second pad-leveldielectric layer, wherein each of the second bonding pads is bonded to arespective one of the first bonding pads, the second pad-leveldielectric layer comprises a second distal surface that is more proximalto the second substrate than distal surfaces of the second bonding padsare to the first substrate, and an air gap is present between the firstpad-level dielectric material layer and the second pad-level dielectriclayer, and the air gap laterally surrounds each bonded pair of the firstbonding pad and second bonding pad.

According to an embodiment of the present disclosure, a method offorming a bonded assembly includes providing a first semiconductor diecontaining a first substrate, first semiconductor devices, and firstbonding pads that are electrically connected to a respective node of thefirst semiconductor devices, forming a first oxidation barrier layer onphysically exposed surfaces of the first bonding pads, providing asecond semiconductor die containing a second substrate, secondsemiconductor devices, and second bonding pads that are electricallyconnected to a respective node of the second semiconductor devices, andbonding the second bonding pads to the first bonding pads with at leastthe first oxidation barrier layer located between the respective firstand second bonding pads.

According to another embodiment of the present disclosure, a bondedassembly comprises a first semiconductor die comprising a firstsubstrate, first semiconductor devices, and first bonding pads that areelectrically connected to a respective node of the first semiconductordevices, and a second semiconductor die comprising a second substrate,second semiconductor devices, and second bonding pads that areelectrically connected to a respective node of the second semiconductordevices, wherein each of the second bonding pads is bonded to arespective one of the first bonding pads. Each bonded pair of a firstbonding pad and a second bonding pad includes an interfacial region thatincludes volumes that are within 10 nm from an interface between thefirst bonding pad and the second bonding pad; and each interfacialregion has an average volume carbon density that is greater than1.0×10¹⁶/cm³.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic vertical cross-sectional view of a firstsemiconductor die after formation of a first bonding dielectric layerand first bonding pads according to a first embodiment of the presentdisclosure.

FIG. 2 is a schematic vertical cross-sectional view of the firstsemiconductor die after selective formation of a first carbon-basedoxidation barrier layer according to the first embodiment of the presentdisclosure.

FIG. 3 is a schematic vertical cross-sectional view of a secondsemiconductor die according to the first embodiment of the presentdisclosure.

FIG. 4 is a schematic vertical cross-sectional view of the secondsemiconductor die after selective formation of a second carbon-basedoxidation barrier layer according to the first embodiment of the presentdisclosure.

FIG. 5 is a schematic vertical cross-sectional view of a first exemplarystructure including the first semiconductor die and the secondsemiconductor die after disposing the second bonding pads over the firstbonding pads according to the first embodiment of the presentdisclosure.

FIG. 6A is a magnified view of a mating pair of a first bonding pad anda second bonding pad at the processing step of FIG. 5 in a firstconfiguration in which the first and second carbon-based oxidationbarrier layers comprise a two-dimensional carbon-containing material.

FIG. 6B is a magnified view of the mating pair of the first bonding padand the second bonding pad in the first configuration after the secondbonding pad is bonded to the first bonding pad.

FIG. 7A is a magnified view of a mating pair of a first bonding pad anda second bonding pad at the processing step of FIG. 5 in a secondconfiguration in which the first and second carbon-based oxidationbarrier layers comprise self-assembly materials.

FIG. 7B is a magnified view of a mating pair of a first bonding pad anda second bonding pad at the processing step of FIG. 5 in a thirdconfiguration in which the first and second carbon-based oxidationbarrier layers comprise self-assembly materials.

FIG. 7C is a magnified view of the mating pair of the first bonding padand the second bonding pad in the second configuration or in the thirdconfiguration after the second bonding pad is bonded to the firstbonding pad.

FIG. 8 is a schematic vertical cross-sectional view of the firstexemplary structure at the processing step of FIG. 6B or FIG. 7Caccording to the first embodiment of the present disclosure.

FIG. 9 is a schematic vertical cross-sectional view of the firstexemplary structure after thinning the first substrate and formingthrough-substrate via structures through the first substrate accordingto the first embodiment of the present disclosure.

FIG. 10 is a schematic vertical cross-sectional view of a firstsemiconductor die after formation of first interconnect-level dielectriclayers and first metal interconnect structures according to a secondembodiment of the present disclosure.

FIG. 11 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first pad-levelsilicon-containing dielectric layer and a first polymer material layeraccording to the second embodiment of the present disclosure.

FIG. 12 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a stack of a first proximal polymermaterial layer and a first distal polymer material layer by a firstplasma treatment according to the second embodiment of the presentdisclosure.

FIG. 13 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first pad cavities according to thesecond embodiment of the present disclosure.

FIG. 14 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first metallic barrier linerlayer according to the second embodiment of the present disclosure.

FIG. 15 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first metallic fill materiallayer according to the second embodiment of the present disclosure.

FIG. 16 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first bonding pads according to thesecond embodiment of the present disclosure.

FIG. 17 is a schematic vertical cross-sectional view of a secondsemiconductor die according to the second embodiment of the presentdisclosure.

FIG. 18 is a schematic vertical cross-sectional view of a secondexemplary structure including the first semiconductor die and the secondsemiconductor die after bonding the second bonding pads to the firstbonding pads according to the second embodiment of the presentdisclosure.

FIG. 19 is a schematic vertical cross-sectional view of an alternativeconfiguration of the first semiconductor die after formation of firstpad cavities according to a second embodiment of the present disclosure.

FIG. 20 is a schematic vertical cross-sectional view of the alternativeconfiguration of the first semiconductor die after formation of a firstmetallic barrier liner layer according to the second embodiment of thepresent disclosure.

FIG. 21 is a schematic vertical cross-sectional view of the alternativeconfiguration of the first semiconductor die after formation of a firstmetallic fill material layer according to the second embodiment of thepresent disclosure.

FIG. 22 is a schematic vertical cross-sectional view of the alternativeconfiguration of the first semiconductor die after formation of firstbonding pads according to the second embodiment of the presentdisclosure.

FIG. 23 is a schematic vertical cross-sectional view of the alternativeconfiguration of the first semiconductor die after formation of a firstself-assembly material (SAM) according to the second embodiment of thepresent disclosure.

FIG. 24 is a schematic vertical cross-sectional view of the alternativeconfiguration of the first semiconductor die after formation of a stackof a first proximal polymer material layer and a first distal polymermaterial layer by a first plasma treatment according to the secondembodiment of the present disclosure.

FIG. 25 is a schematic vertical cross-sectional view of an alternativeconfiguration of a second semiconductor die according to the secondembodiment of the present disclosure.

FIG. 26 is a schematic vertical cross-sectional view of a secondexemplary structure including the first semiconductor die and the secondsemiconductor die after bonding the second bonding pads to the firstbonding pads according to the second embodiment of the presentdisclosure.

FIG. 27 is a schematic vertical cross-sectional view of an alternativeembodiment of the second exemplary structure including the firstsemiconductor die and the second semiconductor die after bonding thesecond bonding pads to the first bonding pads according to the secondembodiment of the present disclosure.

FIG. 28 is a schematic vertical cross-sectional view of a firstsemiconductor die after formation of a first pad-levelsilicon-containing dielectric layer and a first polymer material layeraccording to a third embodiment of the present disclosure.

FIG. 29 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first pad cavities according to thethird embodiment of the present disclosure.

FIG. 30 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first metallic barrier linerlayer and a first metallic fill material layer according to the thirdembodiment of the present disclosure.

FIG. 31 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first bonding pads according to thethird embodiment of the present disclosure.

FIG. 32 is a schematic vertical cross-sectional view of a secondsemiconductor die according to the third embodiment of the presentdisclosure.

FIG. 33 is a schematic vertical cross-sectional view of a thirdexemplary structure including the first semiconductor die and the secondsemiconductor die after bonding the second bonding pads to the firstbonding pads and after formation of a pad-level polymer material layeraccording to the third embodiment of the present disclosure.

FIG. 34 is a schematic vertical cross-sectional view of an alternativeconfiguration of the first semiconductor die after formation of firstbonding pads according to the third embodiment of the presentdisclosure.

FIG. 35 is a schematic vertical cross-sectional view of the alternativeconfiguration of the first semiconductor die after formation of a firstself-assembly material (SAM) according to the third embodiment of thepresent disclosure.

FIG. 36 is a schematic vertical cross-sectional view of an alternativeembodiment of the second semiconductor die according to the thirdembodiment of the present disclosure.

FIG. 37 is a schematic vertical cross-sectional view of an alternativeembodiment of the third exemplary structure including the firstsemiconductor die and the second semiconductor die after bonding thesecond bonding pads to the first bonding pads and after formation of apad-level polymer material layer according to the third embodiment ofthe present disclosure.

FIG. 38 is a schematic vertical cross-sectional view of a firstsemiconductor die after formation of a first pad-levelsilicon-containing dielectric layer, a first polymer material layer, afirst metallic barrier liner layer, and a first metallic fill materiallayer according to a fourth embodiment of the present disclosure.

FIG. 39 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first bonding pads according to thefourth embodiment of the present disclosure.

FIG. 40 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first polymer hairs according tothe fourth embodiment of the present disclosure.

FIG. 41 is a schematic vertical cross-sectional view of a secondsemiconductor die after formation of second bonding pads according tothe fourth embodiment of the present disclosure.

FIG. 42 is a schematic vertical cross-sectional view of a fourthexemplary structure including the first semiconductor die and the secondsemiconductor die after bonding the second bonding pads to the firstbonding pads according to the fourth embodiment of the presentdisclosure.

FIG. 43 is a schematic vertical cross-sectional view of an alternativeconfiguration of the second semiconductor die after formation of secondpolymer hairs according to the fourth embodiment of the presentdisclosure.

FIG. 44 is a schematic vertical cross-sectional view of a firstalternative configuration of the fourth exemplary structure includingthe first semiconductor die and the second semiconductor die afterbonding the second bonding pads to the first bonding pads according tothe fourth embodiment of the present disclosure.

FIG. 45 is a schematic vertical cross-sectional view of a secondalternative configuration of the fourth exemplary structure includingthe first semiconductor die and the second semiconductor die afterbonding the second bonding pads to the first bonding pads according tothe fourth embodiment of the present disclosure.

FIG. 46 is a schematic vertical cross-sectional view of a thirdalternative configuration of the fourth exemplary structure includingthe first semiconductor die and the second semiconductor die afterbonding the second bonding pads to the first bonding pads according tothe fourth embodiment of the present disclosure.

FIG. 47 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first pad-levelsilicon-containing dielectric layer according to the fifth embodiment ofthe present disclosure.

FIG. 48 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first pad cavities according to thefifth embodiment of the present disclosure.

FIG. 49 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first metallic barrier linerlayer according to the fifth embodiment of the present disclosure.

FIG. 50 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first metallic fill materiallayer according to the fifth embodiment of the present disclosure.

FIG. 51 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of first bonding pads according to thefifth embodiment of the present disclosure.

FIG. 52 is a schematic vertical cross-sectional view of the firstsemiconductor die after recessing the first pad-level silicon-containingdielectric layer according to the fifth embodiment of the presentdisclosure.

FIG. 53 is a schematic vertical cross-sectional view of the firstsemiconductor die after formation of a first polymer material layeraccording to the fifth embodiment of the present disclosure.

FIG. 54 is a schematic vertical cross-sectional view of a secondsemiconductor die according to the fifth embodiment of the presentdisclosure.

FIG. 55 is a schematic vertical cross-sectional view of a fifthexemplary structure including the first semiconductor die and the secondsemiconductor die after disposing the second bonding pads on the firstbonding pads according to the fifth embodiment of the presentdisclosure.

FIG. 56 is a schematic vertical cross-sectional view of the fifthexemplary structure after bonding the second bonding pads to the firstbonding pads according to the fifth embodiment of the presentdisclosure.

DETAILED DESCRIPTION

Hybrid wafer-to-wafer bonding utilizes chemical bond formation betweenpad dielectric material layers and between electrically conductivebonding pads of opposing wafers. Metal-to-metal bonding utilizes bondformation between electrically conductive bonding pads of opposingwafers. The present inventors determined that in both types of bonding,the exposed surfaces of electrically conductive bonding pads, such ascopper bonding pads for example, readily oxidize prior to bonding toform a metal oxide (e.g., copper oxide) interlayer at the bondinginterface. The metal oxide interlayer increases the resistivity of thebond between the electrically conductive bonding pads of opposingwafers.

In some embodiments of the present disclosure an oxidation barrier isformed on at least one bonding pad to reduce or eliminate a formation ofthe metal oxide interlayer at the bonding interface. In one embodiment,the oxidation barrier may comprise a carbon-containing material. Theoxidation barrier may be used in a bonded assembly that is bonded byeither hybrid bonding or metal-to-metal bonding, the various aspects ofwhich are described herein in detail.

The drawings are not drawn to scale. Multiple instances of an elementmay be duplicated where a single instance of the element is illustrated,unless absence of duplication of elements is expressly described orclearly indicated otherwise. Ordinals such as “first,” “second,” and“third” are used merely to identify similar elements, and differentordinals may be used across the specification and the claims of theinstant disclosure. The same reference numerals refer to the sameelement or similar element. Unless otherwise indicated, elements havingthe same reference numerals are presumed to have the same compositionand the same function. Unless otherwise indicated, a “contact” betweenelements refers to a direct contact between elements that provides anedge or a surface shared by the elements. As used herein, a firstelement located “on” a second element may be located on the exteriorside of a surface of the second element or on the interior side of thesecond element. As used herein, a first element is located “directly on”a second element if there exist a physical contact between a surface ofthe first element and a surface of the second element. As used herein, a“prototype” structure or an “in-process” structure refers to a transientstructure that is subsequently modified in the shape or composition ofat least one component therein.

As used herein, a “layer” refers to a material portion including aregion having a thickness. A layer may extend over the entirety of anunderlying or overlying structure, or may have an extent less than theextent of an underlying or overlying structure. Further, a layer may bea region of a homogeneous or inhomogeneous continuous structure that hasa thickness less than the thickness of the continuous structure. Forexample, a layer may be located between any pair of horizontal planesbetween, or at, a top surface and a bottom surface of the continuousstructure. A layer may extend horizontally, vertically, and/or along atapered surface. A substrate may be a layer, may include one or morelayers therein, or may have one or more layer thereupon, thereabove,and/or therebelow.

As used herein, a first surface and a second surface are “verticallycoincident” with each other if the second surface overlies or underliesthe first surface and there exists a vertical plane or a substantiallyvertical plane that includes the first surface and the second surface. Asubstantially vertical plane is a plane that extends straight along adirection that deviates from a vertical direction by an angle less than5 degrees. A vertical plane or a substantially vertical plane isstraight along a vertical direction or a substantially verticaldirection, and may, or may not, include a curvature along a directionthat is perpendicular to the vertical direction or the substantiallyvertical direction.

As used herein, a “memory level” or a “memory array level” refers to thelevel corresponding to a general region between a first horizontal plane(i.e., a plane parallel to the top surface of the substrate) includingtopmost surfaces of an array of memory elements and a second horizontalplane including bottommost surfaces of the array of memory elements. Asused herein, a “through-stack” element refers to an element thatvertically extends through a memory level.

As used herein, a “semiconducting material” refers to a material havingelectrical conductivity in the range from 1.0×10⁻⁵ S/m to 1.0×10⁵ S/m.As used herein, a “semiconductor material” refers to a material havingelectrical conductivity in the range from 1.0×10⁻⁵ S/m to 1.0 S/m in theabsence of electrical dopants therein, and is capable of producing adoped material having electrical conductivity in a range from 1.0 S/m to1.0×10⁵ S/m upon suitable doping with an electrical dopant. As usedherein, an “electrical dopant” refers to a p-type dopant that adds ahole to a valence band within a band structure, or an n-type dopant thatadds an electron to a conduction band within a band structure. As usedherein, a “conductive material” refers to a material having electricalconductivity greater than 1.0×10⁵ S/m. As used herein, an “insulatormaterial” or a “dielectric material” refers to a material havingelectrical conductivity less than 1.0×10⁻⁵ S/m. As used herein, a“heavily doped semiconductor material” refers to a semiconductormaterial that is doped with electrical dopant at a sufficiently highatomic concentration to become a conductive material either as formed asa crystalline material or if converted into a crystalline materialthrough an anneal process (for example, from an initial amorphousstate), i.e., to have electrical conductivity greater than 1.0×10⁵ S/m.A “doped semiconductor material” may be a heavily doped semiconductormaterial, or may be a semiconductor material that includes electricaldopants (i.e., p-type dopants and/or n-type dopants) at a concentrationthat provides electrical conductivity in the range from 1.0×10⁻⁵ S/m to1.0×10⁵ S/m. An “intrinsic semiconductor material” refers to asemiconductor material that is not doped with electrical dopants. Thus,a semiconductor material may be semiconducting or conductive, and may bean intrinsic semiconductor material or a doped semiconductor material. Adoped semiconductor material may be semiconducting or conductivedepending on the atomic concentration of electrical dopants therein. Asused herein, a “metallic material” refers to a conductive materialincluding at least one metallic element therein. All measurements forelectrical conductivities are made at the standard condition.

A monolithic three-dimensional memory array is one in which multiplememory levels are formed above a single substrate, such as asemiconductor wafer, with no intervening substrates. The term“monolithic” means that layers of each level of the array are directlydeposited on the layers of each underlying level of the array. Incontrast, two dimensional arrays may be formed separately and thenpackaged together to form a non-monolithic memory device. For example,non-monolithic stacked memories have been constructed by forming memorylevels on separate substrates and vertically stacking the memory levels,as described in U.S. Pat. No. 5,915,167 titled “Three-dimensionalStructure Memory.” The substrates may be thinned or removed from thememory levels before bonding, but as the memory levels are initiallyformed over separate substrates, such memories are not true monolithicthree-dimensional memory arrays. The substrate may include integratedcircuits fabricated thereon, such as driver circuits for a memory device

The various three-dimensional memory devices of the present disclosureinclude a monolithic three-dimensional NAND string memory device, andmay be fabricated using the various embodiments described herein. Themonolithic three-dimensional NAND string is located in a monolithic,three-dimensional array of NAND strings located over the substrate. Atleast one memory cell in the first device level of the three-dimensionalarray of NAND strings is located over another memory cell in the seconddevice level of the three-dimensional array of NAND strings.

Generally, a semiconductor package (or a “package”) refers to a unitsemiconductor device that may be attached to a circuit board through aset of pins or solder balls. A semiconductor package may include asemiconductor chip (or a “chip”) or a plurality of semiconductor chipsthat are bonded throughout, for example, by flip-chip bonding or anotherchip-to-chip bonding. A package or a chip may include a singlesemiconductor die (or a “die”) or a plurality of semiconductor dies. Adie is the smallest unit that may independently execute externalcommands or report status. Typically, a package or a chip with multipledies is capable of simultaneously executing as many external commands asthe total number of planes therein. Each die includes one or moreplanes. Identical concurrent operations may be executed in each planewithin a same die, although there may be some restrictions. In case adie is a memory die, i.e., a die including memory elements, concurrentread operations, concurrent write operations, or concurrent eraseoperations may be performed in each plane within a same memory die. In amemory die, each plane contains a number of memory blocks (or “blocks”),which are the smallest unit that may be erased by in a single eraseoperation. Each memory block contains a number of pages, which are thesmallest units that may be selected for programming A page is also thesmallest unit that may be selected to a read operation.

Referring to FIG. 1, a first semiconductor die 900 according to a firstembodiment of the present disclosure is illustrated. The firstsemiconductor die 900 includes a first substrate 908, firstsemiconductor devices 920 overlying the first substrate 908, firstdielectric material layers (290, 960, 970) overlying the firstsemiconductor devices, and first metal interconnect structures 980embedded in the first dielectric material layers (290, 960, 970). In oneembodiment, the first substrate 908 may be a commercially availablesilicon wafer having a thickness in a range from 500 microns to 1 mm.

Generally, the first semiconductor devices 920 may comprise anysemiconductor device known in the art. In one embodiment, the firstsemiconductor die 900 comprises a memory die, and may include memorydevices, such as a three-dimensional NAND memory device. In anillustrative example, the first semiconductor devices 920 may include avertically alternating stack of insulating layers 32 and electricallyconductive layers 46, and a two-dimensional array of memory openingsvertically extending through the vertically alternating stack (32, 46).The electrically conductive layers 46 may comprise word lines of thethree-dimensional NAND memory device.

A memory opening fill structure 58 may be formed within each memoryopening. A memory opening fill structure 58 may include a memory filmand a vertical semiconductor channel contacting the memory film. Thememory film may include a blocking dielectric, a tunneling dielectricand a charge storage material located between the blocking and tunnelingdielectric. The charge storage material may comprise charge trappinglayer, such as a silicon nitride layer, or a plurality of discretecharge trapping regions, such as floating gates or discrete portions ofa charge trapping layer. In this case, each memory opening fillstructure 58 and adjacent portions of the electrically conductive layers46 constitute a vertical NAND string. Alternatively, the memory openingfill structures 58 may include any type of non-volatile memory elementssuch as resistive memory elements, ferroelectric memory elements, phasechange memory elements, etc. The memory device may include an optionalhorizontal semiconductor channel layer 10 connected to the bottom end ofeach vertical semiconductor channel, and an optional dielectric spacerlayer 910 that provides electrical isolation between the first substrate908 and the horizontal semiconductor channel layer 10.

The electrically conductive layers 46 may be patterned to provide aterrace region in which each overlying electrically conductive layer 46has a lesser lateral extent than any underlying electrically conductivelayer 46. Contact via structures (not shown) may be formed on theelectrically conductive layers 46 in the terrace region to provideelectrical connection to the electrically conductive layers 46.Dielectric material portions 65 may be formed around each verticallyalternating stack (32, 46) to provide electrical isolation amongneighboring vertically alternating stacks (32, 46).

The first dielectric material layers (290, 960, 970) may include firstcontact-level dielectric layers 290 embedding contact via structures andbit lines 982, first interconnect-level dielectric layers 960 that embeda subset of the first metal interconnect structures 980 located abovethe first contact-level dielectric layers 290, and a first bondingdielectric layer 970 that is formed above the first interconnect-leveldielectric layer 960. The bit lines 982 are a subset of the first metalinterconnect structures 980 and may electrically contact drain regionslocated above the semiconductor channel at the top of the memory openingfill structures 58. The contact via structures contact various nodes ofthe first semiconductor devices. Interconnect metal lines andinterconnect metal via structures, which are subsets of the first metalinterconnect structures 980) may be embedded in the firstinterconnect-level dielectric layers 960. The first metal interconnectstructures 980 may be located within the first interconnect-leveldielectric layers 960 or within the first bonding dielectric layer 970.

Each of the first contact-level dielectric layers 290 and the firstinterconnect-level dielectric layers 960 may include a dielectricmaterial such as undoped silicate glass, a doped silicate glass,organosilicate glass, silicon nitride, a dielectric metal oxide, or acombination thereof. The first bonding dielectric layer 970 may include,and/or consist essentially of, a silicon oxide material such as undopedsilicate glass (e.g., silicon oxide) or a doped silicate glass. Thethickness of the first bonding dielectric layer 970 may be in a rangefrom 100 nm to 3,000 nm, although lesser and greater thicknesses mayalso be employed. The first bonding dielectric layer 970 may have aplanar top surface, which may be provided, for example, by aplanarization process such as a chemical mechanical polishing (CMP)process. A topmost layer of the first interconnect-level dielectriclayers 960 may be a dielectric diffusion barrier layer (not expresslyshown), which may be a silicon nitride layer having a thickness in arange from 10 nm to 300 nm.

First bonding pads 988 are formed in the first bonding dielectric layer970, for example, by forming pad cavities in the first bondingdielectric layer 970 and filling the pad cavities with at least oneconductive material. Alternatively, the bonding pads 988 are formed onthe first metal interconnect structures 980 first, followed by formingthe first bonding dielectric layer 970 over and around the first bondingpads 988, followed by planarizing the first bonding dielectric layer 970to expose the top surface of the first bonding pads 988. The at leastone conductive material may be a metallic (i.e., metal or metal alloy)material that may be bonded to the same metallic material or to anothermetallic material by metal-to-metal or hybrid bonding. For example, eachof the first bonding pads 988 may include an optional metallic barrierliner that includes TiN, TaN, and/or WN, and a metal fill materialportion that includes the metallic material that may be bonded to thesame metallic material or to another metallic material by metal-to-metalbonding. For example, the metal fill material portion may include,and/or consist essentially of, any material selected from Cu, a copperalloy including copper at an atomic concentration greater than 70%(which may be greater than 90% and/or 95%), or a cobalt or nickel alloy,such as CoW, CoWP, CoMoP, NiW, and/or NiWP.

Each of the first bonding pads 988 is surrounded by the first bondingdielectric layer 970 and contacts a respective underlying one of thefirst metal interconnect structures 980. Each of the first bonding pads988 is electrically connected to a respective node of the firstsemiconductor devices 920.

Referring to FIG. 2, a first oxidation barrier layer 992 may be formedon the physically exposed surfaces (e.g., top surface) of the firstbonding pads 988. The first oxidation barrier layer 992 may be formed byany suitable deposition method on the exposed surfaces of the firstbonding pads 988, such as by selective deposition, by lift-off or bynon-selective deposition followed by patterning (e.g., photolithographicpatterning and etching). The first oxidation barrier layer 992 comprisesa material which prevents or reduces oxidation of the first bonding padsby at least 50%. In one embodiment, the oxidation barrier layer maycomprise a first carbon-based oxidation barrier layer 992 which includesa first carbon-based oxidation barrier material. The first carbon-basedoxidation barrier layer 992 is formed on the physically exposed surfacesof the first bonding pads 988 without forming the first carbon-basedoxidation barrier material on the physically exposed surfaces of thefirst bonding dielectric layer 970. Thus, the first carbon-basedoxidation barrier layer 992 may be formed as discrete material portionsthat are located on a top surface of a respective one of the firstbonding pads 988.

As used herein, a carbon-based oxidation barrier material refers to amaterial that may function as an oxidation barrier for a metallicmaterial and includes carbon atoms at a weight percentage greater than50%. The carbon-based oxidation barrier material may include carbonatoms at a weight percentage in a range from 50% to 100%, such as from80% to 99%. The carbon-based oxidation barrier material may consistessentially of carbon, or may include non-carbon atoms. The firstcarbon-based oxidation barrier layer 992 may be an electricallyconductive material, such as graphene or metallic carbon nanotubes.Alternatively, the first carbon-based oxidation barrier layer 992 may bean electrically insulating material which has a sufficiently smallthickness which does not substantially increase the resistivity of theinterface of the bonding pads after bonding. The first carbon-basedoxidation barrier layer 992 may have a thickness in a range from 0.3 nmto 3 nm, although a greater thickness may also be used.

In one embodiment, the first carbon-based oxidation barrier layer 992may comprise a material consisting essentially of carbon. For example,the first carbon-based oxidation barrier layer 992 may compriseamorphous carbon, diamond-like carbon, graphene, or carbon nanotubes.The carbon atoms of the first carbon-based oxidation barrier materialmay combine with residual oxygen atoms on, or in, the first bonding pads988 and second bonding pads of a second semiconductor die to which thefirst bonding pads 988 are bonded during a subsequent anneal process.The first carbon-based oxidation barrier layer 992 may be formed by aselective chemical vapor deposition process that nucleates the firstcarbon-based oxidation barrier material on the physically exposedsurfaces of the first bonding pads 988 without nucleating the firstcarbon-based oxidation barrier material on the physically exposedsurfaces of the first bonding dielectric layer 970. During the selectivechemical vapor deposition (CVD) process, structures formed by assemblyof carbon atoms may nucleate only on the metallic surfaces of the firstbonding pads 988, and do not nucleate on the physically exposed surfacesof the first bonding dielectric layer 970, thereby forming the firstcarbon-based oxidation barrier layer 992 only on the physically exposedsurfaces of the first bonding pads 988. The selective chemical vapordeposition process may be a thermal chemical vapor deposition process,such as low pressure CVD (LPCVD) or may be a plasma enhanced chemicalvapor deposition process (PECVD), such as electron cyclotron resonanceCVD (ECR-CVD). For example, graphene may be selectively formed on copperusing LPCVD or ECR-CVD.

In another embodiment, the first carbon-based oxidation barrier layer992 may be formed by a coating process in which the first carbon-basedoxidation barrier material is chemically bonded to the physicallyexposed surfaces of the first bonding pads 988 without attachment to thephysically exposed surfaces of the first bonding dielectric layer 970.In one embodiment, the first carbon-based oxidation barrier layer 992may include a monolayer of a self-assembly material (SAM). In oneembodiment, the self-assembly material may include an alkane thiolprecursor compound having a first end with affinity to a material of thefirst bonding pads 988 and without affinity to a material of the firstbonding dielectric layer 970. Thus, the self-assembly material may beself-assembled onto the physically exposed surfaces of the first bondingpads 988 without being attached to the first bonding dielectric layer970 by depositing a suspension containing the SAM precursors onto thefirst bonding pads 988 and the first bonding dielectric layer 970. Inthis case, the first carbon-based oxidation barrier material maydecompose partially or completely during a subsequent anneal process inwhich the first bonding pads 988 are bonded to second bonding pads of asecond semiconductor die.

Generally, the first carbon-based oxidation barrier layer 992 preventsor reduces surface oxidation of the material of the first bonding pads988. By reducing the amount of oxygen incorporated into surface portionsof the first bonding pads 988, the first bonding pads 988 may have agreater bonding strength upon bonding to second bonding pads of a secondsemiconductor die, and a lower resistivity interface between the firstand second bonding pads.

Referring to FIG. 3, a second semiconductor die 700 is illustrated. Thesecond semiconductor die 700 includes a second substrate 708, secondsemiconductor devices 720 overlying the second substrate 708, seconddielectric material layers (740, 760, 770) overlying the secondsemiconductor devices 720, and second metal interconnect structures 780embedded in the second dielectric material layers (740, 760, 770). Inone embodiment, the second semiconductor devices 720 may include atleast one complementary metal oxide semiconductor (CMOS) circuitryincluding field effect transistors. In one embodiment, the secondsubstrate 708 may be a commercially available silicon substrate having athickness in a range from 500 microns to 1 mm.

Generally, the second semiconductor devices may comprise anysemiconductor device that may be operated in conjunction with the firstsemiconductor devices in the first semiconductor die 900 to provideenhanced functionality. In one embodiment, the first semiconductor die900 comprises a memory die and the second semiconductor die 700comprises a logic die that includes a support circuitry (i.e., aperipheral circuitry) for operation of memory devices (such as athree-dimensional array of memory elements) within the memory die. Inone embodiment, the first semiconductor die 900 may include athree-dimensional memory device including a three-dimensional array ofmemory elements, word lines (that may comprise a subset of theelectrically conductive lines 46), and bit lines 982, the secondsemiconductor devices 720 of the second semiconductor die 700 mayinclude a peripheral circuitry for operation of the three-dimensionalarray of memory elements. The peripheral circuitry may include one ormore word line driver circuits that drive the word lines of thethree-dimensional array of memory elements of the first semiconductordie 900, one or more bit line driver circuits that drive the bit lines982 of the first semiconductor die 900, one or more word line decodercircuits that decode the addresses for the word lines, one or more bitline decoder circuits that decode the addresses for the bit lines 982,one or more sense amplifier circuits that sense the states of memoryelements within the memory opening fill structures 58 of the firstsemiconductor die 900, a source power supply circuit that provides powerto the horizontal semiconductor channel layer 10 in the firstsemiconductor die 900, a data buffer and/or latch, and/or any othersemiconductor circuit that may be used to operate three-dimensionalmemory device of the first semiconductor die 900.

The second dielectric material layers (740, 760, 770) may includeproximal interconnect-level dielectric layers 740 embedding a proximalsubset of the second metal interconnect structures 780 that is proximalto the second substrate 708, distal interconnect-level dielectric layers760 embedding a distal subset of second metal interconnect structures780 that is distal from the second substrate 708, and a second bondingdielectric layer 770 that is formed above the distal interconnect-leveldielectric layers 760. The second metal interconnect structures 780 maybe located within the proximal interconnect-level dielectric layer 740,within the distal interconnect-level dielectric layers 760, or withinthe second bonding dielectric layer 770.

The proximal interconnect-level dielectric layers 740 and the distalinterconnect-level dielectric layers 760 may include a dielectricmaterial such as undoped silicate glass (e.g., silicon oxide), a dopedsilicate glass, organosilicate glass, silicon nitride, a dielectricmetal oxide, or a combination thereof. The second bonding dielectriclayer 770 may include undoped silicate glass or a doped silicate glass(e.g., a doped or undoped silicon oxide material). The thickness of thesecond bonding dielectric layer 770 may be in a range from 100 nm to3,000 nm, although lesser and greater thicknesses may also be employed.The second bonding dielectric layer 770 may have a planar top surface,which may be provided, for example, by a planarization process such as achemical mechanical polishing (CMP) process.

Second bonding pads 788 are formed in the second bonding dielectriclayer 770, for example, by forming pad cavities in the second bondingdielectric layer 770 and filling the pad cavities with at least oneconductive material. Alternatively, the bonding pads 788 are formed onthe second metal interconnect structures 780 first, followed by formingthe second bonding dielectric layer 770 over and around the secondbonding pads 788, followed by planarizing the second bonding dielectriclayer 770 to expose the top surface of the second bonding pads 788. Theat least one conductive material may be a metallic (i.e., metal or metalalloy) material that may be bonded to the same metallic material or toanother metallic material by metal-to-metal or hybrid bonding. Forexample, each of the first bonding pads 988 may include an optionalmetallic barrier liner that includes TiN, TaN, and/or WN, and a metalfill material portion that includes the metallic material that may bebonded to the same metallic material or to another metallic material bymetal-to-metal bonding. For example, the metal fill material portion mayinclude, and/or consist essentially of, any material selected from Cu, acopper alloy including copper at an atomic concentration greater than70% (which may be greater than 90% and/or 95%), or a cobalt or nickelalloy, such as CoW, CoWP, CoMoP, NiW, and/or NiWP. The material of thesecond bonding pads 788 may be the same as, or may be different from,the material of the first bonding pads 988.

Each of the second bonding pads 788 is embedded in the second bondingdielectric layer 770 and contacts a respective underlying one of thesecond metal interconnect structures 780. Each of the second bondingpads 788 is electrically connected to a respective node of the secondsemiconductor devices 720.

The types of devices of the first semiconductor die 900 and of thesecond semiconductor die 700 may be selected in any manner such that thedevices 920 of the first semiconductor die 900 and the devices 720 ofthe second semiconductor die 700 may communicate with each other, andcontrol, and or are controlled by, devices in the other semiconductordie. In one embodiment, one of the first semiconductor die 900 and thesecond semiconductor die 700 comprises a memory die including memoryelements, such as a three-dimensional array of memory elements, andanother of the first semiconductor die 900 and the second semiconductordie 700 comprises a logic die including peripheral circuitryconfigurated to operate the memory elements, such as thethree-dimensional array of memory elements.

Referring to FIG. 4, a second oxidation barrier layer 792 may beoptionally formed on the physically exposed surfaces (e.g., top surface)of the second bonding pads 788. The second oxidation barrier layer 792(if present) may be the same as or different from the material of thefirst oxidation barrier layer 992. The second oxidation barrier layer792 may be formed by any suitable deposition method on the exposedsurfaces of the second bonding pads 788, such as by selectivedeposition, by lift-off or by non-selective deposition followed bypatterning (e.g., photolithographic patterning and etching). The secondoxidation barrier layer 792 comprises a material which prevents orreduces oxidation of the second bonding pads by at least 50%. In oneembodiment, the second oxidation barrier layer may comprise a secondcarbon-based oxidation barrier layer 792 which includes a secondcarbon-based oxidation barrier material, as defined above with respectto the first carbon-based oxidation barrier layer 992. The secondcarbon-based oxidation barrier layer 792 is formed on the physicallyexposed surfaces of the second bonding pads 788 without forming thesecond carbon-based oxidation barrier material on the physically exposedsurfaces of the second bonding dielectric layer 770. Thus, the secondcarbon-based oxidation barrier layer 792 may be formed as discretematerial portions that are located on a top surface of a respective oneof the second bonding pads 788. The second carbon-based oxidationbarrier layer 792 may have a thickness in a range from 0.3 nm to 3 nm,although a greater thickness may also be used.

In one embodiment, the second carbon-based oxidation barrier layer 792may comprise a material consisting essentially of carbon. For example,the second carbon-based oxidation barrier layer 792 may compriseamorphous carbon, diamond-like carbon, graphene, or carbon nanotubes.The carbon atoms of the second carbon-based oxidation barrier materialmay combine with residual oxygen atoms on, or in, the second bondingpads 788 and the first bonding pads 988 to which the second bonding pads788 are bonded during a subsequent anneal process. The secondcarbon-based oxidation barrier layer 792 may be formed by a selectivechemical vapor deposition process that nucleates the second carbon-basedoxidation barrier material on the physically exposed surfaces of thesecond bonding pads 788 without nucleating the second carbon-basedoxidation barrier material on the physically exposed surfaces of thesecond bonding dielectric layer 770. During the selective chemical vapordeposition (CVD) process, structures formed by assembly of carbon atomsmay nucleate only on the metallic surfaces of the second bonding pads788, and do not nucleate on the physically exposed surfaces of thesecond bonding dielectric layer 770, thereby forming the secondcarbon-based oxidation barrier layer 792 only on the physically exposedsurfaces of the second bonding pads 792. The selective chemical vapordeposition process may be a thermal chemical vapor deposition process,or may be a plasma-assisted chemical vapor deposition process (PECVD),such as electron cyclotron resonance CVD (ECR-CVD). For example,graphene may be selectively formed on copper using LPCVD or ECR-CVD.

In another embodiment, the second carbon-based oxidation barrier layer792 may be formed by a coating process in which the second carbon-basedoxidation barrier material is chemically bonded to the physicallyexposed surfaces of the second bonding pads 788 without attachment tothe physically exposed surfaces of the second bonding dielectric layer770. In one embodiment, the second carbon-based oxidation barrier layer792 may include a monolayer of a self-assembly material (SAM). In oneembodiment, the self-assembly material may include an alkane thiolprecursor compound having a first end with affinity to a material of thesecond bonding pads 788 and without affinity to a material of the secondbonding dielectric layer 770. Thus, the self-assembly material may beself-assembled onto the physically exposed surfaces of the secondbonding pads 788 without being attached to the second bonding dielectriclayer 770

In one embodiment, the first carbon-based oxidation barrier layer 992may include a first self-assembly material having a first end having afirst head group attached to the first bonding pads 988, and a secondend having a first terminal (i.e., tail) group. The second carbon-basedoxidation barrier layer 792 may include a second self-assembly materialhaving a first end having a second head group attached to the secondbonding pads 788, and a second end having a second terminal (i.e., tail)group configured to chemically bond to the first terminal group of thefirst self-assembly material. The first head group may be the same as ordifferent from the second head group. The first terminal group may bethe same or different from the second terminal group. In one embodiment,the second carbon-based oxidation barrier material may decomposepartially or completely during a subsequent anneal process in which thesecond bonding pads 788 are bonded to the first bonding pads 988 of thefirst semiconductor die 900.

Generally, the second carbon-based oxidation barrier layer 792 preventsor reduces surface oxidation of the material of the second bonding pads788. By reducing the amount of oxygen incorporated into surface portionsof the second bonding pads 788, the second bonding pads 788 may have agreater bonding strength upon bonding to the first bonding pads 988 ofthe first semiconductor die 900, and a lower resistivity interfacebetween the first and second bonding pads.

Referring to FIG. 5, the first semiconductor die 900 and the secondsemiconductor die 700 are oriented such that the first bondingdielectric layer 970 faces the second bonding dielectric layer 770. Thesecond semiconductor die 700 and the first semiconductor die 900 arebrought into contact such that a surface of the second dielectricmaterial layers (740, 760, 770) (such as a surface of the second bondingdielectric layer 770) contacts a surface of the first dielectricmaterial layers (290, 960, 970) (such as a surface of the first bondingdielectric layer 970). The first semiconductor die 900 and the secondsemiconductor die 700 may be laterally aligned such that each secondbonding pad 788 faces a respective one of the first bonding pads 988. Inone embodiment, the pattern of the second bonding pads 788 may be amirror image of the pattern of the first bonding pads 988 with optionaldifferences in the size of bonding pads between the first semiconductordie 900 and the second semiconductor die 700. In one embodiment, thefirst bonding pads 988 and the corresponding second bonding pads 788 mayhave the same size (i.e., lateral width). In another embodiment, thefirst bonding pads 988 and the corresponding second bonding pads 788 mayhave different sizes. In one embodiment, areal overlap between eachfacing pair of a first bonding pad 988 and a second bonding pad 788 maybe at least 80%, and/or at least 90%, such as 90 to 100%, of the area ofthe smaller one of the first bonding pad 988 and the second bonding pad788.

Referring to FIG. 6A, a magnified view of a mating pair of a firstbonding pad 988 and a corresponding second bonding pad 788 is shown atthe processing step of FIG. 5 in a first configuration, in which thefirst and second carbon-based oxidation barrier layers (992, 792)comprise a two-dimensional carbon-containing material. In this case,each portion of the first carbon-based oxidation barrier layer 992 maybe a portion of a first two-dimensional carbon-containing material layer992A having a thickness in a range from 0.3 nm to 3 nm, consistingessentially of carbon, and including material selected from amorphouscarbon, diamond-like carbon, graphene, and carbon nanotubes. Eachportion of the second carbon-based oxidation barrier layer 792 may be aportion of a second two-dimensional carbon-containing material layer792A having a thickness in a range from 0.3 nm to 3 nm, consistingessentially of carbon, and including material selected from amorphouscarbon, diamond-like carbon, graphene, and carbon nanotubes.

Referring to FIG. 6B, the second bonding pads 788 may be bonded to thefirst bonding pads 988 by performing an anneal process that inducesmetal-to-metal bonding between the second bonding pads 788 and the firstbonding pads 988 and optionally dielectric bonding between therespective bonding dielectric layers 970 and 770. Generally, the secondbonding pads 788 may be bonded to the first bonding pads 988 with atleast the first carbon-based oxidation barrier layer 992 there between.In one embodiment, only the first carbon-based oxidation barrier layer992 is present between a mating pair of a first bonding pad 988 and asecond bonding pad 788. In another embodiment, the first carbon-basedoxidation barrier layer 992 and the second carbon-based oxidationbarrier layer 792 are present between a mating pair of a first bondingpad 988 and a second bonding pad 788. The first carbon-based oxidationbarrier material and the second carbon-based oxidation barrier material,if present, may optionally diffuse into the first bonding pads 988 andthe second bonding pads 788 during the bonding process, and/or thebonding pad metal, such as copper may diffuse into the first and/orsecond carbon-based oxidation barrier material.

The anneal temperature may be selected based on the composition of thesecond bonding pads 788 and the first bonding pads 988. For example, ifthe second bonding pads 788 and the first bonding pads 988 include metalfill portions that consist essentially of copper, the anneal temperaturemay be in a range from 150 degrees Celsius to 400 degrees Celsius.Residual oxygen atoms on, or in, the first bonding pads 988 and thesecond bonding pads 788 may combine with the first and/or secondcarbon-based oxidation barrier material, such as graphene during theanneal. For example, the oxygen atoms may diffuse from the bonding padsthrough the graphene via Stone-Wales defects and form a carboxyl groupon the graphene surface which may aid in the bonding process. Thegraphene may also improve the resistance and breakdown current densityof copper in the bonding pads.

An optional first interfacial region 994 may be formed in a surfaceportion of each first bonding pad 988, and/or an optional secondinterfacial region 794 may be formed in a surface portion of each secondbonding pad 788. Each interfacial region (994, 794) may include carbonatoms provided from the first carbon-based oxidation barrier layer 992and the optional second carbon-based oxidation barrier layer 792. Eachbonded pair of a first bonding pad 988 and a second bonding pad 788 mayinclude a respective interfacial region (994, 794) that includes volumesthat are within 10 nm from an interface between the first bonding pad988 and the second bonding pad 788. In one embodiment, each interfacialregion (994, 794) may have an average volume carbon density that isgreater than 1.0×10¹⁶/cm³, such as 5×10¹⁶/cm³ to 1×10²²/cm³.

In one embodiment, oxide-to-oxide bonding may optionally simultaneouslyoccur between the first bonding dielectric layer 970 and the secondbonding dielectric layer 770 during bonding of the second bonding pads788 to the first bonding pads 988. In this hybrid bonding embodiment,the second bonding dielectric layer 770 may be bonded to the firstbonding dielectric layer 970 during bonding of the second bonding pads788 to the first bonding pads 988 via oxide-to-oxide bonding.

Referring to FIG. 7A, a magnified view of a mating pair of a firstbonding pad 988 and a second bonding pad 788 is shown at the processingstep of FIG. 5 in a second configuration, in which the first and secondcarbon-based oxidation barrier layers (922, 722) comprise self-assemblymaterials. In this case, each portion of the first carbon-basedoxidation barrier layer 992 may be a portion of a firstcarbon-containing self-assembly material layer 992B formed by a coatingprocess in which a first carbon-based oxidation barrier material isattached to the physically exposed surfaces of the first bonding pads988 without attachment to the physically exposed surfaces of the firstbonding dielectric layer 970. Likewise, each portion of the secondcarbon-based oxidation barrier layer 792 may be a portion of a secondcarbon-containing self-assembly material layer 792B formed by a coatingprocess in which a second carbon-based oxidation barrier material isattached to the physically exposed surfaces of the second bonding pads788 without attachment to the physically exposed surfaces of the secondbonding dielectric layer 770. In one embodiment, each of the firstcarbon-containing self-assembly material layer 992B and the secondcarbon-containing self-assembly material layer 792B may include amonolayer of a self-assembly material (SAM), which may include an alkanecompound having a first end with affinity to a material of the firstbonding pads 988 or the second bonding pads 788 and without affinity toa material of the first bonding dielectric layer 970 or the secondbonding dielectric layer 770. In one embodiment, each of the firstcarbon-containing self-assembly material layer 992B and the secondcarbon-containing self-assembly material layer 792B may include carbonatoms at a weight percentage greater than 50%.

In one embodiment, the first carbon-containing self-assembly materiallayer 992B and the second carbon-containing self-assembly material layer792B may include a monolayer of an alkane thiol having a chemicalformula of CH₃(CH₂)_(n-1)SH.

Referring to FIG. 7B, a magnified view of a mating pair of a firstbonding pad 988 and a second bonding pad 788 is shown at the processingstep of FIG. 5 in a third configuration. The first and secondcarbon-based oxidation barrier layers (992, 792) comprise self-assemblymaterials as in the second configuration illustrated in FIG. 7A. In thiscase, the first carbon-containing self-assembly material layer 992B mayinclude a monolayer of a first self-assembly material. The firstself-assembly material may include an alkane compound having a first end(i.e., a first head group) with affinity to a material of the firstbonding pads 988 and without affinity to the material of the firstbonding dielectric layer 970 and having a second end (i.e., a first tailgroup). The second carbon-containing self-assembly material layer 792Bmay include a monolayer of a second self-assembly material. The secondself-assembly material may include an alkane compound having a first end(i.e., a second head group) with affinity to a material of the secondbonding pads 788 and without affinity to the material of the secondbonding dielectric layer 770 and having a second end (i.e., a secondtail group). The second end (e.g., second tail group A) of the secondself-assembly material may include a functional group that isselectively bonded to a functional group of the second end (e.g., thefirst tail group B) of the first self-assembly material. For example, aself-assembly material may include a thiol (e.g., sulfur containing)head group configured to bond to a copper bonding pad, a CH₂ backboneand a methyl (CH₃) or a hydroxide tail group configured to bind toanother similar or different tail group of the corresponding SAM bondedto the opposing corresponding bonding pad. In this embodiment, theopposing SAMs (792B, 992B) function as adhesion layers which bond toeach other and improve the adhesion between the opposing bonding pads.

Referring to FIG. 7C, the second bonding pads 788 may be bonded to thefirst bonding pads 988 by performing an anneal process that inducesmetal-to-metal bonding between the second bonding pads 788 and the firstbonding pads 988. The same processing steps may be used as theprocessing steps of FIG. 6B. The first carbon-based oxidation barrierlayer 992 (comprising the first carbon-containing self-assembly materiallayer 992B) and the second carbon-based oxidation barrier layer 792(comprising the second carbon-containing self-assembly material layer792B) are present between a mating pair of a first bonding pad 988 and asecond bonding pad 788. The first carbon-based oxidation barriermaterial and the second carbon-based oxidation barrier material maybreak apart into individual atoms and/or groups of atoms, and diffuseinto the first bonding pads 988 and the second bonding pads 788 duringthe bonding process.

The carbon atoms, in combination with oxygen atoms and/or hydrogen atomsand/or additional atoms such as nitrogen and/or sulfur provided in thefirst and second carbon-containing self-assembly material layers (992B,792B), or in an atomic form, are distributed in surface regions of thefirst bonding pads 988 and in surface regions of the second bonding pads788. An optional first interfacial region 994 may be formed in a surfaceportion of each first bonding pad 988, and/or an optional secondinterfacial region 794 may be formed in a surface portion of each secondbonding pad 788. Each interfacial region (994, 794) may include carbonatoms provided from the first carbon-based oxidation barrier layer 992and the optional second carbon-based oxidation barrier layer 792. Eachbonded pair of a first bonding pad 988 and a second bonding pad 788includes a respective interfacial region (994, 794) that includesvolumes that are within 10 nm from an interface between the firstbonding pad 988 and the second bonding pad 788. In one embodiment, eachinterfacial region (994, 794) may have an average volume carbon densitythat is greater than 1.0×10¹⁶/cm³, such as 5×10¹⁶/cm³ to 1×10²²/cm³. TheSAMs may serve as adhesion layers that enhance the bond strength of thebonding pads to the bonding dielectric layer of the opposing die if thesize and/or relative position of the pair of corresponding bonding padsare different or offset. The SAMs may prevent or reduce metal (e.g.,copper) diffusion from the bonding pads into the bonding dielectriclayer of the opposing die if the size and/or relative position of thepair of corresponding bonding pads are different or offset. The SAMs mayalso protect the bonding pads from oxidation and contamination.

In one embodiment, oxide-to-oxide bonding may simultaneously occurbetween the first bonding dielectric layer 970 and the second bondingdielectric layer 770 during bonding of the second bonding pads 788 tothe first bonding pads 988. In this hybrid bonding case, the secondbonding dielectric layer 770 may be bonded to the first bondingdielectric layer 970 during bonding of the second bonding pads 788 tothe first bonding pads 988 via oxide-to-oxide bonding.

Referring to FIG. 8, a bonded assembly including the first semiconductordie 900 and the second semiconductor die 700 is illustrated after theprocessing steps of FIG. 6B or after the processing steps of FIG. 7C.This completes the bonding process. Alternatively, additional processsteps may be performed as described below with respect to FIG. 9.

Referring to FIG. 9, optional through-substrate contact via structures714 may be formed through the second substrate 708 or through the firstsubstrate 908. The second substrate 708 (or the first substrate 908) maybe thinned from the backside by grinding, polishing, an anisotropicetch, or an isotropic etch. A backside insulating layer 702 may beformed on the backside of the second substrate 708. A photoresist layer(not shown) may be applied on the backside of the second substrate 708,and may be lithographically patterned to form opening therethrough. Thelocation of the openings through the patterned photoresist layer may beselected such that each opening through the photoresist layer is locatedentirely within the area of a respective one of the second metalinterconnect structures 780.

An anisotropic etch process may be performed using the patternedphotoresist layer as an etch mask layer. The anisotropic etch processmay etch through unmasked regions of the second substrate 708 andthrough the proximal interconnect-level dielectric material layers 740.The etch chemistries of the various steps of the anisotropic etchprocess may be selected to etch through the various unmasked materialportions, and the terminal step of the anisotropic etch process mayinclude an etch chemistry that anisotropically etches one of theproximal interconnect-level dielectric material layers 740 selective tothe metallic material of the second metal interconnect structures.

Via cavities extending at least through the second substrate 708 and theproximal interconnect-level dielectric material layers 740 may beformed. The via cavities are herein referred to as through-substrate viacavities. Each of the through-substrate via cavities may include arespective vertical or substantially vertical sidewall, and verticallyextends from the backside surface of the second substrate 708 to aproximal surface of a respective one of the second metal interconnectstructures 780, which may be a metal pad. Thus, a proximal surface of asecond metal interconnect structure 780 (such as a proximal surface of abonding pad) is physically exposed at the bottom of eachthrough-substrate via cavity.

At least one electrically conductive material such as at least onemetallic material may be deposited in the through-substrate viacavities. The at least one conductive material may include, for example,a metallic barrier liner material such as TiN, TaN, and/or WN, and ametallic fill material such as W, Co, Cu, Ru, and/or Mo. The at leastone conductive material may be deposited by physical vapor deposition orchemical vapor deposition or atomic layer deposition or electrochemicaldeposition or electro-less deposition or combinations thereof. The atleast one conductive material may be patterned into discrete portions toprovide through-substrate via structures 714. The upper portion of eachthrough-substrate via structure 714 that protrudes above the backsideinsulating layer 702 includes a metallic pad structure, which may beused as an external bonding pad. Each through-substrate via structure714 may include a metallic barrier liner 714L and a metallic fillmaterial portion 714C.

Referring to FIGS. 1-9 and according to various embodiments of thepresent disclosure, a bonded assembly is provided, which comprises: afirst semiconductor die 900 comprising a first substrate 908, firstsemiconductor devices 920, and first bonding pads 988 that areelectrically connected to a respective node of the first semiconductordevices 920, and a second semiconductor die 700 comprising a secondsubstrate 708, second semiconductor devices 720, and second bonding pads788 that are electrically connected to a respective node of the secondsemiconductor devices. Each of the second bonding pads 788 is bonded toa respective one of the first bonding pads 988. Each bonded pair of afirst bonding pad 988 and a second bonding pad 788 includes aninterfacial region 994 and/or 794 that includes volumes that are within10 nm from an interface between the first bonding pad 988 and the secondbonding pad 788. Each interfacial region has an average volume carbondensity that is greater than 1.0×10¹⁶/cm³.

In one embodiment, the first bonding pads 988 are located within a firstbonding dielectric layer 970, the second bonding pads 788 are locatedwithin a second bonding dielectric layer 770, the first bondingdielectric layer 970 and the second bonding dielectric layer 770comprise silicon oxide, and the second bonding dielectric layer 770 isbonded to the first bonding dielectric layer 970 via oxide-to-oxidebonding.

In one embodiment, if the first carbon-based oxidation barrier layer 992and/or for the second carbon-based oxidation barrier layer 792 remainintact and do not entirely diffuse into the first and/or second bondingpads, then each interfacial region 994 and/or 794 contains a carboncontaining layer 992 and/or 792.

In one embodiment, each interfacial region 994 and/or 794 may containgraphene or carbon nanotubes. In one embodiment, in case graphene orcarbon nanotubes are provided in the first carbon-based oxidationbarrier layer 992 and/or in the second carbon-based oxidation barrierlayer 792, then the layers 992 and/or 792 may be disrupted duringbonding to leave clusters of carbon atoms within the interfacial regions(994, 794). In one embodiment, at least 50% of all carbon atoms in eachinterfacial region (994, 794) is within a respective two-dimensionalcluster of carbon atoms in which carbon atoms are bonded to each otherin a hexagonal lattice structure (e.g., residual portion of graphene orclusters of carbon nanotubes).

In another embodiment, if the self-assembly material is provided in thefirst carbon-based oxidation barrier layer 992 and/or in the secondcarbon-based oxidation barrier layer 792, then each interfacial regionmay contain a least one of an alkane compound and/or a thiol compound ifthe SAM layers decompose during bonding. Hydrogen atoms and other atomsderived from the self-assembly material may be present in theinterfacial regions (994, 794). In one embodiment, each interfacialregion (994, 794) may have an average volume hydrogen density that isgreater than 1.0×10¹⁶/cm³.

In one embodiment, the first semiconductor die 900 comprises firstdielectric material layers (290, 860, 970) located on the firstsemiconductor devices and embedding first metal interconnect structures980, the first bonding pads 988 are electrically connected to arespective one of the first metal interconnect structures 980, thesecond semiconductor die 700 comprises second dielectric material layers(740, 760, 770) located on the second semiconductor devices andembedding second metal interconnect structures 780, and the secondbonding pads 788 are electrically connected to a respective one of thesecond metal interconnect structures 780.

In one embodiment, one of the first semiconductor die 900 and the secondsemiconductor die 700 comprises a memory die including athree-dimensional array of memory elements, and another one of the firstsemiconductor die and the second semiconductor die comprises a logic dieincluding a peripheral circuitry configurated to operate thethree-dimensional array of memory elements.

The first carbon-based oxidation barrier layer 992 and/or for the secondcarbon-based oxidation barrier layer 792 may reduce oxidation of thefirst bonding pads 988 and/or the second bonding pads 788, therebyenhancing the bonding strength between the first bonding pads 988 andthe second bonding pads 788. Further, reduction of oxygen density in theinterfacial regions (994, 794) may reduce the interfacial resistance ofthe bonded pairs of a first bonding pad 988 and a second bonding pad788, thereby improving current flow between the first semiconductor die900 and the second semiconductor die 700.

Referring to FIG. 10, a first semiconductor die 900 according to asecond embodiment of the present disclosure can be derived from thefirst semiconductor die 900 of FIG. 1 by omitting the processing stepsfor formation of the first bonding dielectric layer 970 and the firstbonding pads 988. The top surface of the topmost layer of the firstinterconnect-level dielectric layers 960 and top surfaces of the topmostones of the first metal interconnect structures 980 can be physicallyexposed.

Referring to FIG. 11, a first pad-level silicon-containing dielectriclayer 972 and a first polymer material layer 974 can be sequentiallydeposited over the first interconnect-level dielectric layers 960 andthe first metal interconnect structures 980. The first pad-levelsilicon-containing dielectric layer 972 and the first polymer materiallayer 974 are subsequently employed to embed first bonding pads, and assuch, are collectively referred to as a first pad-level dielectric layer971.

The first pad-level silicon-containing dielectric layer 972 includes asilicon-containing dielectric material such as silicon oxide, siliconnitride, silicon carbon nitride, silicon oxynitride, or any otherdielectric material that includes silicon atoms at an atomic percentagegreater than 10%. The first pad-level silicon-containing dielectriclayer 972 can be deposited by chemical vapor deposition, spin coating,and/or physical vapor deposition, and may have a thickness in a rangefrom 50 nm to 6,000 nm, such as from 100 nm to 3,000 nm, although lesserand greater thicknesses can also be employed.

The first polymer material layer 974 includes a first polymer material,which may be an organic polymer material or an inorganic polymermaterial. The first polymer material includes polymerized assembly ofmonomer units. In one embodiment, the first polymer material can includepolynorbornene, polycarbonate, polyimide, polyaldehyde, or any otherpolymer material that can provide high adhesion strength. The firstpolymer material layer 974 may be formed, for example, by spin coatingand curing. The thickness of the first polymer material layer 974 can bein a range from 200 nm to 6,000 nm, such as from 500 nm to 2,500 nm,although lesser and greater thicknesses can also be employed. Thethickness of the first pad-level dielectric layer 971 can be in a rangefrom 1,000 nm to 10,000 nm, although lesser and greater thicknesses canalso be employed.

Referring to FIG. 12, a first plasma treatment is performed on a surfaceportion of the first polymer material layer 974 with a first plasma. Thefirst plasma treatment may be performed in a process chamber employinghydrogen plasma, helium plasma, neon plasma, argon plasma, nitrogenplasma, oxygen plasma, or a combination thereof. The type of plasmaemployed for the first plasma treatment process can be selected based onthe type of the first polymer material such that the plasma-treatedsurface portion of the first polymer material layer 974 is convertedinto a plasma-modified polymer material. The plasma-treated portion ofthe first polymer material layer 974 is herein referred to as a firstdistal polymer material layer 974D, and the underlying untreated portionof the first polymer material layer 974 is herein referred to as a firstproximal polymer material layer 974P. The first distal polymer materiallayer 974D is more distal from the first substrate 908 than the firstproximal polymer material layer 974P is from the first substrate 908.The vertical stack of the first proximal polymer material layer 974P andthe first distal polymer material layer 974D constitutes a first polymermaterial layer (974P, 974D). The thickness of the first distal polymermaterial layer 974D may be in a range from 1 nm to 200 nm, such as from3 nm to 50 nm, although lesser and greater thicknesses can also beemployed. The thickness of the first distal polymer material layer 974Dcan be optimized by adjusting the radio frequency (RF) power during thefirst plasma treatment process.

In one embodiment, the plasma-modified polymer material of the firstdistal polymer material layer 974D may have a greater hydrophilicitythan the underlying portion of the first polymer material layer 974(i.e., the first proximal polymer material layer 974P) that is nottreated with the first plasma. In this embodiment, the increase in thehydrophilicity of the first distal polymer material layer 974D relativeto the first proximal polymer material layer 974P causes the firstdistal polymer material layer 974D to have higher surface energy thanthe first proximal polymer material layer 974P. Further, the increase inthe hydrophilicity of the first distal polymer material layer 974Drelative to the first proximal polymer material layer 974P causes thefirst distal polymer material layer 974D to have a smaller contact anglethan the first proximal polymer material layer 974P. In other words, thefirst plasma treatment causes the first distal polymer material layer974D to be attached to a hydrophilic surface with greater adhesionstrength in case such a hydrophilic surface contacts the first distalpolymer material layer 974D. The structural modification by the firstplasma within the first distal polymer material layer 974D may bevertically graded with a greater modification at the physically exposedsurface of the first distal polymer material layer 974D than at theinterface with the first proximal polymer material layer 974P. Thus, theincrease in the hydrophilicity within the first distal polymer materiallayer 974D can be greater at the physically exposed surface of the firstdistal polymer material layer 974D than at the interface with the firstproximal polymer material layer 974P.

In one embodiment, the first plasma increases bond scission on thepolymer surface and formation of active sites. The active sites bondwith other atoms or molecules in air (such as O and N) forming anincreased density of the polar functional groups which increases thesurface energy and hydrophilicity of the polymer. The increase in totalsurface energy is a result of an increase in the density of polarfunctional groups in the first polymer material in the first distalpolymer material layer 974D. The first proximal polymer material layer974P may be essentially free of the polar function groups, or mayinclude the polar functional groups at a density that is lower than adensity of the polar functional groups within the first distal polymermaterial layer 974D. In one embodiment, the polar function groups cancomprise at least one of a carbonyl group, a carboxyl group, an aminegroup, an amide group, or a hydroxyl group. In one embodiment, the firstdistal polymer material layer 974D includes the polar functional groupsat a distal functional group density, and the first proximal polymermaterial layer 974P can be essentially free of the polar function groupsor can include the polar functional groups at a proximal functionalgroup density that is lower than the distal functional group density.

In another embodiment, the first plasma increases a cross-linkingdensity of the first polymer material in the first distal polymermaterial layer 974D, and the first distal polymer material layer 974Dhas a cross-linking density that is greater than a cross-linking densitywithin the first proximal polymer material layer 974P.

Generally, the first distal polymer material layer 974D and the firstproximal polymer material layer 974P can comprise polymers of a samemonomer having different linking densities. The first proximal polymermaterial layer 974P has a first cross-linking density among monomerunits therein, the first distal polymer material layer 974D has a secondcross-linking density among monomer units therein, and the secondcross-linking density is higher than the first cross-linking density.The increased cross-linking density leads to an increase in totalsurface energy, which is a result of an increase in its dispersive(non-polar) component.

Referring to FIG. 13, a first photoresist layer (not shown) can beapplied over the first distal polymer material layer 974D, and can belithographically patterned to form an array of discrete openings inareas that overlie a respective one of the topmost ones of the firstmetal interconnect structures 980, i.e., a subset of the first metalinterconnect structures 980 that is in contact with the bottom surfaceof the first pad-level silicon-containing dielectric layer 972. Theopenings in the photoresist layer can have the shapes of bonding pads tobe subsequently formed. Each opening in the photoresist layer can have ahorizontal cross-sectional shape of a polygon, a circle, an ellipse, oranother two-dimensional curvilinear shape having a closed periphery. Forexample, the openings in the photoresist layer can have rectangularshapes. Each side of the rectangular shapes may have a lateral dimensionin a range from 2 microns to 60 microns, such as from 5 micron to 30microns, although lesser and greater lateral dimensions can also beemployed. In case the first distal polymer material layer 974D and thefirst proximal polymer material layer 974P include a photosensitivematerial (such as polyimide), the first distal polymer material layer974 can be directly lithographically patterned by lithographic exposureand patterning without use of the first photoresist layer.

An anisotropic etch process can be performed to transfer the pattern inthe first photoresist layer through the first distal polymer materiallayer 974D, the first proximal polymer material layer 974P, and thefirst pad-level silicon-containing dielectric layer 972. First padcavities 975 are formed through the first distal polymer material layer974D, the first proximal polymer material layer 974P, and the firstpad-level silicon-containing dielectric layer 972. A top surface of arespective topmost one of the first metal interconnect structures 980 isphysically exposed at the bottom of each first pad cavity 975. The firstphotoresist layer can be subsequently removed, for example, by ashing.In case the first distal polymer material layer 974D and the firstproximal polymer material layer 974P include a photosensitive materialand are directly lithographically patterned, the anisotropic etchprocess can etch through the first pad-level silicon-containingdielectric layer 972 to form the first pad cavities 975.

Referring to FIG. 14, a first metallic barrier liner layer 983L can bedeposited by a conformal or a non-conformal deposition process. Thefirst metallic barrier liner 983L includes a metallic barrier materialthat functions as a diffusion barrier material for metallic materials,moisture, and impurity atoms. For example, the first metallic barrierliner 983L can include TiN, TaN, WN, TiC, TaC, WC, or an alloy of astack thereof. The first metallic barrier liner 983L may be deposited byphysical vapor deposition and/or by chemical vapor deposition. Thethickness of vertically-extending portions (or tapered portions) of thefirst metallic barrier liner layer 983L that are in contact withsidewalls of the first pad-level dielectric layer 971 can be in a rangefrom 3 nm to 100 nm, such as from 6 nm to 50 nm, although lesser andgreater thicknesses can also be employed.

Referring to FIG. 15, a first metallic fill material layer 984L can bedeposited on the first metallic barrier liner 983L. The first metallicfill material layer 984L includes a metallic material that can providemetal-to-metal bonding at an elevated temperature less than 500 degreesCelsius, such as less than 450 degrees Celsius. For example, the firstmetallic fill material layer 984L can include, and/or can consistessentially of, copper or a copper-containing metallic alloy material.The first metallic fill material layer 984L can be deposited by physicalvapor deposition, chemical vapor deposition, electroplating, and/orelectroless plating. For example, the first metallic fill material layer984L can be formed by depositing a metal seed layer by physical vapordeposition, and electroplating an additional metal layer on the metalseed layer. The thickness of the first metallic fill material layer 984Lcan be selected such that all volumes of the first pad cavities 975 arefilled with the metallic material(s) of the first metallic fill materiallayer 984L.

Referring to FIG. 16, a planarization process can be performed to removeportions of the first metallic fill material layer 984L and the firstmetallic barrier liner layer 983L from above the horizontal planeincluding the top surface of the first distal polymer material layer974D. For example, a chemical mechanical planarization process can beperformed to remove the portions of the first metallic fill materiallayer 984L and the first metallic barrier liner layer 983L that overliethe horizontal plane including the top surface of the first distalpolymer material layer 974D. Each remaining portion of the firstmetallic fill material layer 984L in a respective first pad cavity 975constitutes a first metallic fill material portion 984. Each remainingportion of the first metallic barrier liner layer 983L in a respectivefirst pad cavity 975 constitutes a first metallic barrier liner 983.Each contiguous combination of a first metallic barrier liner 983 and afirst metallic fill material portion 984 constitutes a first bonding pad988, which fills a respective one of the first pad cavities 975.

Generally, the first semiconductor die 900 comprises a first substrate908, first semiconductor devices 920, first bonding pads 988 that areelectrically connected to a respective node of the first semiconductordevices 920 and laterally surrounded by a first pad-level dielectriclayer 971. The first pad-level dielectric layer 971 can include a stackof a first pad-level silicon-containing dielectric layer 972, a firstproximal polymer material layer 974P, and a first distal polymermaterial layer 974D.

Referring to FIG. 17, a second semiconductor die 700 according to thesecond embodiment of the present disclosure can be derived from thesecond semiconductor die 700 of FIG. 3 by omitting the processing stepsfor formation of the second bonding dielectric layer 770 and the secondbonding pads 788. The top surface of the topmost layer of the secondinterconnect-level dielectric layers 760 and top surfaces of the topmostones of the second metal interconnect structures 780 can be physicallyexposed.

The processing steps of FIGS. 11-16 can be performed while makingsuitable modificationto form the second semiconductor die 700 of FIG.17. Specifically, a second pad-level silicon-containing dielectric layer772 and a second polymer material layer can be sequentially depositedover the second interconnect-level dielectric layers 760 and the secondmetal interconnect structures 780. The second pad-levelsilicon-containing dielectric layer 772 and the second polymer materiallayer are subsequently employed to embed second bonding pads, and assuch, are collectively referred to as a second pad-level dielectriclayer 771.

The second pad-level silicon-containing dielectric layer 772 includes asilicon-containing dielectric material such as silicon oxide, siliconnitride, silicon carbon nitride, silicon oxynitride, or any otherdielectric material that includes silicon atoms at an atomic percentagegreater than 10%. The second pad-level silicon-containing dielectriclayer 772 can be deposited by chemical vapor deposition, spin coating,and/or physical vapor deposition, and may have a thickness in a rangefrom 50 nm to 6,000 nm, such as from 100 nm to 3,000 nm, although lesserand greater thicknesses can also be employed.

The second polymer material layer includes a second polymer material,which may be an organic polymer material or an inorganic polymermaterial. The second polymer material includes polymerized assembly ofmonomer units. In one embodiment, the second polymer material caninclude polynorbornene, polyimide, polyaldehyde, or any other polymermaterial that can provide high adhesion strength. The second polymermaterial may be the same as, or may be different from, the first polymermaterial. The second polymer material layer may be formed, for example,by spin coating and curing. The thickness of the second polymer materiallayer can be in a range from 200 nm to 6,000 nm, such as from 500 nm to2,500 nm, although lesser and greater thicknesses can also be employed.The thickness of the second pad-level dielectric layer 771 can be in arange from 1,000 nm to 10,000 nm, although lesser and greaterthicknesses can also be employed.

A second plasma treatment is performed on a surface portion of thesecond polymer material layer with a second plasma. The second plasmatreatment may be performed in a process chamber employing hydrogenplasma, helium plasma, neon plasma, argon plasma, nitrogen plasma,oxygen plasma, or a combination thereof. The type of plasma employed forthe second plasma treatment process can be selected based on the type ofthe second polymer material. The plasma-treated portion of the secondpolymer material layer is herein referred to as a second distal polymermaterial layer 774D, and the underlying untreated portion of the secondpolymer material layer is herein referred to as a second proximalpolymer material layer 774P. The second distal polymer material layer774D is more distal from the second substrate 708 than the secondproximal polymer material layer 774P is from the second substrate 708.The vertical stack of the second proximal polymer material layer 774Pand the second distal polymer material layer 774D constitutes a secondpolymer material layer (974P, 774D). The thickness of the second distalpolymer material layer 774D may be in a range from 1 nm to 200 nm, suchas from 3 nm to 50 nm, although lesser and greater thicknesses can alsobe employed. The thickness of the second distal polymer material layer774D can be optimized by adjusting the radio frequency (RF) power duringthe second plasma treatment process.

In one embodiment, the plasma-modified polymer material of the seconddistal polymer material layer 774D may have a greater hydrophilicitythan the underlying portion of the second polymer material layer 774(i.e., the second proximal polymer material layer 774P) that is nottreated with the second plasma. In another embodiment, the plasmatreatment increases the cross-linking density of the second polymermaterial in the second distal polymer material layer 774D, and thesecond distal polymer material layer 774D has a cross-linking densitythat is greater than a cross-linking density within the second proximalpolymer material layer 774P.

A second photoresist layer (not shown) can be applied over the seconddistal polymer material layer 774D, and can be lithographicallypatterned to form an array of discrete openings in areas that overlie arespective one of the topmost ones of the second metal interconnectstructures 780, i.e., a subset of the second metal interconnectstructures 780 that is in contact with the bottom surface of the secondpad-level silicon-containing dielectric layer 772. The openings in thephotoresist layer can have the shapes of bonding pads to be subsequentlyformed. Each opening in the photoresist layer can have a horizontalcross-sectional shape of a polygon, a circle, an ellipse, or anothertwo-dimensional curvilinear shape having a closed periphery. Forexample, the openings in the photoresist layer can have rectangularshapes. Each side of the rectangular shapes may have a lateral dimensionin a range from 2 microns to 60 microns, such as from 5 microns to 30microns, although lesser and greater lateral dimensions can also beemployed. In case the second distal polymer material layer 774D and thesecond proximal polymer material layer 774P include a photosensitivematerial (such as polyimide), the second distal polymer material layercan be directly lithographically patterned by lithographic exposure andpatterning without use of the second photoresist layer.

An anisotropic etch process can be performed to transfer the pattern inthe second photoresist layer through the second distal polymer materiallayer 774D, the second proximal polymer material layer 774P, and thesecond pad-level silicon-containing dielectric layer 772. Second padcavities are formed through the second distal polymer material layer774D, the second proximal polymer material layer 774P, and the secondpad-level silicon-containing dielectric layer 772. A top surface of arespective topmost one of the second metal interconnect structures 780is physically exposed at the bottom of each second pad cavity. Thesecond photoresist layer can be subsequently removed, for example, byashing. In case the second distal polymer material layer 774D and thesecond proximal polymer material layer 774P include a photosensitivematerial and are directly lithographically patterned, the anisotropicetch process can etch through the second pad-level silicon-containingdielectric layer 772 to form the second pad cavities.

A second metallic barrier liner layer can be deposited by a conformal ora non-conformal deposition process. The second metallic barrier linerincludes a metallic barrier material that functions as a diffusionbarrier material for metallic materials, moisture, and impurity atoms.For example, the second metallic barrier liner can include TiN, TaN, WN,TiC, TaC, WC, or an alloy of a stack thereof. The second metallicbarrier liner may be deposited by physical vapor deposition and/or bychemical vapor deposition. The thickness of vertically-extendingportions (or tapered portions) of the second metallic barrier linerlayer that are in contact with sidewalls of the second pad-leveldielectric layer 771 can be in a range from 3 nm to 100 nm, such as from6 nm to 50 nm, although lesser and greater thicknesses can also beemployed.

A second metallic fill material layer can be deposited on the secondmetallic barrier liner. The second metallic fill material layer includesa metallic material that can provide metal-to-metal bonding at anelevated temperature less than 500 degrees Celsius, such as less than450 degrees Celsius, such as 300 to 400 degrees Celsius. For example,the second metallic fill material layer can include, and/or can consistessentially of, copper or a copper-containing metallic alloy material.The second metallic fill material layer can be deposited by physicalvapor deposition, chemical vapor deposition, electroplating, and/orelectroless plating. For example, the second metallic fill materiallayer can be formed by depositing a metal seed layer by physical vapordeposition, and electroplating an additional metal layer on the metalseed layer. The thickness of the second metallic fill material layer canbe selected such that all volumes of the second pad cavities are filledwith the metallic material(s) of the second metallic fill materiallayer.

A planarization process can be performed to remove portions of thesecond metallic fill material layer and the second metallic barrierliner layer from above the horizontal plane including the top surface ofthe second distal polymer material layer 774D. For example, a chemicalmechanical planarization process can be performed to remove the portionsof the second metallic fill material layer and the second metallicbarrier liner layer that overlie the horizontal plane including the topsurface of the second distal polymer material layer 774D. Each remainingportion of the second metallic fill material layer in a respectivesecond pad cavity constitutes a second metallic fill material portion784. Each remaining portion of the second metallic barrier liner layerin a respective second pad cavity constitutes a second metallic barrierliner 783. Each contiguous combination of a second metallic barrierliner 783 and a second metallic fill material portion 784 constitutes asecond bonding pad 788, which fills a respective one of the second padcavities.

Generally, the second semiconductor die 700 comprises a second substrate708, second semiconductor devices 720, second bonding pads 788 that areelectrically connected to a respective node of the second semiconductordevices 720 and laterally surrounded by a second pad-level dielectriclayer 771. The second pad-level dielectric layer 771 can include a stackof a second pad-level silicon-containing dielectric layer 772, a secondproximal polymer material layer 774P, and a second distal polymermaterial layer 774D.

Referring to FIG. 18, the first semiconductor die 900 and the secondsemiconductor die 700 are oriented such that each of the first bondingpads 988 faces a respective one of the second bonding pads 788. Thesecond semiconductor die 700 and the first semiconductor die 900 arebrought into contact such that the second pad-level dielectric layer 771contacts the first pad-level dielectric layer 971. The firstsemiconductor die 900 and the second semiconductor die 700 may belaterally aligned such that each second bonding pad 788 contacts arespective one of the first bonding pads 988. In one embodiment, thepattern of the second bonding pads 788 may be a mirror image of thepattern of the first bonding pads 988 with optional differences in thesize of bonding pads between the first semiconductor die 900 and thesecond semiconductor die 700. In one embodiment, the first bonding pads988 and the corresponding second bonding pads 788 may have the same size(i.e., lateral width). In another embodiment, the first bonding pads 988and the corresponding second bonding pads 788 may have different sizes.In one embodiment, areal overlap between each facing pair of a firstbonding pad 988 and a second bonding pad 788 may be at least 80%, and/orat least 90%, such as 90 to 100%, of the area of the smaller one of thefirst bonding pad 988 and the second bonding pad 788.

Subsequently, the second bonding pads 788 may be bonded to the firstbonding pads 988 by performing an anneal process that inducesmetal-to-metal bonding between the second bonding pads 788 and the firstbonding pads 988 and between the second pad-level dielectric layer 771contacts the first pad-level dielectric layer 971, i.e., between thesecond distal polymer material layer 774D and the first distal polymermaterial layer 974D. The anneal temperature may be selected based on thecomposition of the second bonding pads 788 and the first bonding pads988. For example, if the second bonding pads 788 and the first bondingpads 988 include metal fill portions that consist essentially of copper,the anneal temperature may be in a range from 250 degrees Celsius to 400degrees Celsius.

The first bonding pads 988 are bonded to the second bonding pads 788while the first polymer material of the first distal polymer materiallayer 974D contacts the second pad-level dielectric layer 771. In oneembodiment, the first polymer material of the first distal polymermaterial layer 974D can contact the second polymer material of thesecond distal polymer material layer 774D while the first bonding pads988 are bonded to the second bonding pads 788. The first plasmatreatment enhances adhesive strength between the first distal polymermaterial layer 974D and the second distal polymer material layer 774D.Further, the second plasma treatment also enhances adhesive strengthbetween the first distal polymer material layer 974D and the seconddistal polymer material layer 774D

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

Referring to FIG. 19, an alternative configuration of the firstsemiconductor die 900 is illustrated, which may be derived from thefirst semiconductor die 900 of FIG. 11 by performed processing steps ofFIG. 13 without performing the plasma treatment processing step of FIG.12. In other words, the processing sequences of FIGS. 11-13 are modifiedto omit the processing steps of FIG. 12. The plasma treatment step isperformed last in this alternative embodiment. First pad cavities 975can be formed. Each first pad cavity 975 can extend through a verticalstack of a first pad-level silicon-containing dielectric layer 972 and afirst polymer material layer 974.

Referring to FIG. 20, the processing steps of FIG. 14 can be performedto form a first metallic barrier liner layer 983L.

Referring to FIG. 21, the processing steps of FIG. 15 can be performedto form a first metallic fill material layer 984L.

Referring to FIG. 22, the processing steps of FIG. 16 can be performedto form first bonding pads 988. In this case, the top surface of thefirst polymer material layer 974 can be employed as the stopping layerfor the chemical mechanical planarization process. Each first bondingpad 988 can include a first metallic barrier liner 983 and a firstmetallic fill material portion 984, as in the prior embodiment.

Referring to FIG. 23, a first self-assembly material (SAM) layer 986including a first SAM material can be selectively formed on eachphysically exposed surface of the first bonding pads 988 whilesuppressing deposition of the first SAM material on the first polymermaterial layer 974. The first SAM material may include any material thatself-assembles on metallic surfaces without assembly on dielectricsurfaces such as the surfaces of the first polymer material layer 974.In one embodiment, the first SAM material can be any material that maybe employed for the first carbon-based oxidation barrier layer 992described above. In one embodiment, the first SAM material may have ahead group that is attached to the physically exposed surfaces of thefirst bonding pads 988 and a first tail group that is located on theopposite side of the head group and is physically exposed. The first SAMlayer 986 can include a monolayer of the first SAM material. The firstSAM material can include a material that can retard oxidation of theunderlying metallic material(s) of the first bonding pads 988 during thesubsequent bonding process.

Referring to FIG. 24, a first plasma treatment is performed on a surfaceportion of the first polymer material layer 974 with a first plasma. Thefirst plasma treatment may be performed as described above with respectto FIG. 12 above. The first SAM layer 986 can protect the first bondingpads 988 from the first plasma, and can reduce structural damage,impurity incorporation, and/or chemical reaction that may be otherwiseinduced by the first plasma.

Referring to FIG. 25, an alternative configuration of a secondsemiconductor die 700 is illustrated, which can be derived from thesecond semiconductor die 700 of FIG. 3 by omitting the processing stepsfor formation of the second bonding dielectric layer 770 and the secondbonding pads 788, and by performing the processing steps of FIGS. 19-24while making suitable modifications. A second SAM material having asecond tail group can be selectively formed on physically exposedsurfaces of the second bonding pads 788 while suppressing deposition ofthe second SAM material on the second polymer material layer 774. In oneembodiment, the second tail group has affinity to the first tail group,which facilitates alignment of the second bonding pads 788 to the firstbonding pads 988 during a subsequent alignment step prior to bonding thesecond bonding pads 788 to the first bonding pads 988.

The second semiconductor die 700 can be treated with a second plasma byperforming a second plasma treatment process, which can be substantiallythe same as the first plasma treatment process of FIG. 12.

Referring to FIG. 26, the first semiconductor die 900 of FIG. 24 and thesecond semiconductor die 700 of FIG. 25 can be bonded to each other byperforming the processing steps of FIG. 18. The dishing features at thesurfaces of the first bonding pads 988 and the second bonding pads 788can be removed during the bonding process as the materials of the firstbonding pads 988 and the second bonding pads 788 expand thermally duringthe anneal process and fills the voids caused by the dishing features.Thus, the bonding interfaces between the first bonding pads 988 and thesecond bonding pads 788 may be substantially planar, and may besubstantially free of voids. The first SAM layer 986 and the second SAMlayer 786 temporarily protect the first bonding pads 988 and the secondbonding pads 788 from oxidation until the decomposition temperatures forthe first SAM material and the second SAM material are reached, at whichtemperature the first SAM material and the second SAM materialdecompose.

The first bonding pads 988 are bonded to the second bonding pads 788while the first polymer material of the first distal polymer materiallayer 974D contacts the second pad-level dielectric layer 771. In oneembodiment, the first polymer material of the first distal polymermaterial layer 974D can contact the second polymer material of thesecond distal polymer material layer 774D while the first bonding pads988 are bonded to the second bonding pads 788. The first plasmatreatment enhances adhesive strength between the first distal polymermaterial layer 974D and the second distal polymer material layer 774D.Further, the second plasma treatment enhances adhesive strength betweenthe first distal polymer material layer 974D and the second distalpolymer material layer 774D

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

While embodiments described above employ plasma treatment on two polymermaterial layers (974, 774) provided on two different semiconductor dies(900, 700), the plasma treatment can be performed on only one polymermaterial layer provided on a semiconductor die. Referring to FIG. 27, analternative embodiment of the second exemplary structure is illustrated,which can be formed employing the first semiconductor die 900 of FIG. 16or the first semiconductor die 900 of FIG. 24, and by employing a secondsemiconductor die 700 in which a second pad-level dielectric layerconsists of a second pad-level silicon-containing dielectric layer 772(such as a silicon oxide layer).

In this case, the first bonding pads 988 are bonded to the secondbonding pads 788 while the first polymer material of the first distalpolymer material layer 974D contacts the second pad-level dielectriclayer which comprises the second pad-level silicon-containing dielectriclayer 772. Thus, the first polymer material of the first distal polymermaterial layer 974D can contact the material of the second pad-levelsilicon-containing dielectric layer 772 (such as silicon oxide) whilethe first bonding pads 988 are bonded to the second bonding pads 788.The first plasma treatment enhances adhesive strength between the firstdistal polymer material layer 974D and the second pad-levelsilicon-containing dielectric layer 772.

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

Referring to FIGS. 10-27 and according to various embodiments of thepresent disclosure, a bonded assembly (900, 700) is provided, whichcomprises: a first semiconductor die 900 comprising a first substrate908, first semiconductor devices 920, first bonding pads 988 that areelectrically connected to a respective node of the first semiconductordevices 920 and laterally surrounded by a first pad-level dielectriclayer 971, wherein the first pad-level dielectric layer 971 comprises astack of a first proximal polymer material layer 974P and a first distalpolymer material layer 974D having at least one of greaterhydrophilicity or greater cross-linking density than first proximalpolymer material layer 974P; and a second semiconductor die 700comprising a second substrate 708, second semiconductor devices 720, andsecond bonding pads 788 that are electrically connected to a respectivenode of the second semiconductor devices 720 and laterally surrounded bya second pad-level dielectric layer (771 or 772), wherein each of thesecond bonding pads 788 is bonded to a respective one of the firstbonding pads 988, and the first distal polymer material layer 974Dcontacts the second pad-level dielectric layer (771 or 772).

In one embodiment, the first distal polymer material layer 974D has ahigher hydrophilicity and a higher surface energy than the firstproximal polymer material layer 974P; and the first distal polymermaterial layer 974D has a smaller contact angle than the first proximalpolymer material layer 974P. In one embodiment, the first distal polymermaterial layer 974D and the first proximal polymer material layer 974Pcomprise polymers of a same monomer. In one embodiment, the firstproximal polymer material layer 974P has a first cross-linking densityamong monomer units therein; the first distal polymer material layer974D has a second cross-linking density among monomer units therein; andthe second cross-linking density is higher than the first cross-linkingdensity.

In one embodiment, the first distal polymer material layer 974Dcomprises polar functional groups. In one embodiment, the polarfunctional groups comprise at least one of a carbonyl group, a carboxylgroup, an amine group, an amide group, or a hydroxyl group. In oneembodiment, the first distal polymer material layer 974D includes thepolar functional groups at a distal functional group density; and thefirst proximal polymer material layer 974P is essentially free of thepolar functional groups or includes the polar functional groups at aproximal functional group density that is lower than the distalfunctional group density.

In one embodiment, the first proximal polymer material layer 974P has afirst cross-linking density among monomer units therein; the firstdistal polymer material layer 974D has a second cross-linking densityamong monomer units therein; and the second cross-linking density ishigher than the first cross-linking density.

In one embodiment, the second pad-level dielectric layer 771 comprises astack of a second proximal polymer material layer 774P and a seconddistal polymer material layer 774D having greater hydrophilicity thansecond proximal polymer material layer 774P and contacting the secondproximal polymer material layer 774P. In another embodiment, the secondpad-level dielectric layer 771 comprises a stack of a second proximalpolymer material layer 774P and a second distal polymer material layer774D having greater cross-linking density than the second proximalpolymer material layer and contacting the second proximal polymermaterial layer 774P.

Alternatively, the second pad-level dielectric layer comprises thesecond pad-level silicon-containing dielectric layer 772 which comprisesa silicon-containing dielectric material (such as silicon oxide, siliconnitride, silicon carbon nitride, or silicon oxynitride) in contact withthe first distal polymer material layer 974D.

Referring to FIG. 28, a first semiconductor die 900 according to a thirdembodiment of the present disclosure is illustrated. The firstsemiconductor die 900 of the third embodiment can be derived from thefirst semiconductor die 900 of the second embodiment illustrated in FIG.11 by employing a polymer material that is miscible with another polymermaterial as the first polymer material of the first polymer materiallayer 974. In other words, a pair of miscible polymer materialsincluding a first polymer material and a second polymer material isemployed in the third embodiment of the present disclosure, and thefirst polymer material layer 974 includes the first miscible polymermaterial of the pair of miscible polymer materials.

In one embodiment, a combination of the two miscible polymer materialsmay be selected from a combination of styrene maleic anhydride (SMA) andtetra-glycidyl ether of diphenyl diamino methane (TGDDM), a combinationof maleic anhydride grafted polypropylene (PP-g-MA) and tetra-glycidylether of diphenyl diamino methane (TGDDM), or a combination ofpoly(methyl methacrylate) (PMMA) and polyvinylidene fluoride (PVDF). Thefirst polymer material may be selected from SMA, TGDDM, PP-g-MA, PMMA orPVDF.

The first pad-level silicon-containing dielectric layer 972 can bedeposited by chemical vapor deposition, spin coating, and/or physicalvapor deposition, and may have a thickness in a range from 50 nm to6,000 nm, such as from 100 nm to 3,000 nm, although lesser and greaterthicknesses can also be employed. The first polymer material layer 974may be formed, for example, by spin coating and curing. The thickness ofthe first polymer material layer 974 can be in a range from 200 nm to6,000 nm, such as from 500 nm to 2,500 nm, although lesser and greaterthicknesses can also be employed. The thickness of the first pad-leveldielectric layer 971 can be in a range from 1,000 nm to 10,000 nm,although lesser and greater thicknesses can also be employed.

Referring to FIG. 29, the processing steps of FIG. 19 can be performedto form an array of first pad cavities 975. A top surface of arespective one of the first metal interconnect structures 980 can bephysically exposed at the bottom of each first pad cavity 975.

Referring to FIG. 30, the processing steps of FIGS. 14 and 15 can beperformed to form a first metallic barrier liner layer 983L and a firstmetallic fill material layer 984L.

Referring to FIG. 31, the processing steps of FIG. 16 can be performedto form first bonding pads 988. In this case, the top surface of thefirst polymer material layer 974 can be employed as the stopping layerfor the chemical mechanical planarization process. Each first bondingpad 988 can include a first metallic barrier liner 983 and a firstmetallic fill material portion 984. Generally, the first semiconductordie 900 comprises a first substrate 908, first semiconductor devices920, first bonding pads 988 that are electrically connected to arespective node of the first semiconductor devices 920 and laterallysurrounded by a first polymer material layer 974 including a firstpolymer material.

Referring to FIG. 32, a second semiconductor die 700 according to thethird embodiment of the present disclosure derived from the secondsemiconductor die 700 of FIG. 3 by omitting the processing steps forformation of the second bonding dielectric layer 770 and the secondbonding pads 788, and by performing the processing steps of FIGS. 28-31while making suitable modifications. Particularly, the second polymermaterial layer 774 of the third embodiment of the present disclosureincludes a second polymer material that is miscible with the firstpolymer material of the first polymer material layer 974. The firstpolymer material and the second polymer material comprise a combinationof the two miscible polymer materials, which may be selected from acombination of SMA and TGDDM, a combination of PP-g-MA and TGDDM, or acombination of PMMA and PVDF. If the first polymer material comprisesSMA or PP-g-MA, then the second polymer material may comprise TGDDM. Ifthe first polymer material comprises TGDDM, then the second polymermaterial may comprise SMA or PP-g-MA. If the first polymer materialcomprises PMMA, then the second polymer material may comprise PVDF. Ifthe first polymer material comprises PVDF, then the second polymermaterial may comprise PMMA. Any miscible combination of two polymermaterials may be employed for the first polymer material and the secondpolymer material.

The second pad-level silicon-containing dielectric layer 772 can bedeposited by chemical vapor deposition, spin coating, and/or physicalvapor deposition, and may have a thickness in a range from 50 nm to6,000 nm, such as from 100 nm to 3,000 nm, although lesser and greaterthicknesses can also be employed. The second polymer material layer 774may be formed, for example, by spin coating and curing. The thickness ofthe second polymer material layer 774 can be in a range from 200 nm to6,000 nm, such as from 500 nm to 2,500 nm, although lesser and greaterthicknesses can also be employed. The thickness of the second pad-leveldielectric layer 771 can be in a range from 1,000 nm to 10,000 nm,although lesser and greater thicknesses can also be employed.

Generally, the second semiconductor die 700 comprises a second substrate708, second semiconductor devices 720, and second bonding pads 788 thatare electrically connected to a respective node of the secondsemiconductor devices 720 and laterally surrounded by a second polymermaterial layer 774 including a second polymer material which is misciblewith the first polymer material.

Referring to FIG. 33, the first semiconductor die 900 and the secondsemiconductor die 700 are oriented such that each of the first bondingpads 988 faces a respective one of the second bonding pads 788. Thesecond semiconductor die 700 and the first semiconductor die 900 arebrought into contact such that the second polymer material layer 774contacts the first polymer material layer 974. The first semiconductordie 900 and the second semiconductor die 700 may be laterally alignedsuch that each second bonding pad 788 contacts a respective one of thefirst bonding pads 988. In one embodiment, the pattern of the secondbonding pads 788 may be a mirror image of the pattern of the firstbonding pads 988 with optional differences in the size of bonding padsbetween the first semiconductor die 900 and the second semiconductor die700. In one embodiment, the first bonding pads 988 and the correspondingsecond bonding pads 788 may have the same size (i.e., lateral width). Inanother embodiment, the first bonding pads 988 and the correspondingsecond bonding pads 788 may have different sizes. In one embodiment,areal overlap between each facing pair of a first bonding pad 988 and asecond bonding pad 788 may be at least 80%, and/or at least 90%, such as90 to 100%, of the area of the smaller one of the first bonding pad 988and the second bonding pad 788.

Subsequently, the second bonding pads 788 may be bonded to the firstbonding pads 988 by performing an anneal process that inducesmetal-to-metal bonding between the second bonding pads 788 and the firstbonding pads 988 while inducing intermixing of the first polymermaterial and the second polymer material. The anneal temperature may beselected based on the composition of the second bonding pads 788 and thefirst bonding pads 988, and based on the compositions of the firstpolymer material and the second polymer material. For example, if thesecond bonding pads 788 and the first bonding pads 988 include metalfill portions that consist essentially of copper, the anneal temperaturemay be in a range from 200 degrees Celsius to 400 degrees Celsius.

Mixing the first polymer material and the second polymer materialinduces formation of a pad-level polymer material layer 979 including ablend of first polymer material and the second polymer material having asingle phase structure. Generally, the blend of the first polymermaterial and the second polymer material can be formed by annealing thefirst polymer material layer 974 and the second polymer material layer774 at an elevated temperature in a range from 200 degrees Celsius to400 degrees Celsius, such as from 200 degrees Celsius to 250 degreesCelsius. The blend may be formed during the same anneal as the bondingpad anneal and/or during a separate lower temperature anneal prior tothe higher temperature bonding pad anneal.

Each first bonding pad 988 can be laterally surrounded by a firstpad-level dielectric layer 971, which includes a combination of thefirst pad-level silicon-containing dielectric layer 972 and a firstportion 979A of the pad-level polymer material layer 979 located on thefirst-semiconductor-die side of the horizontal plane including thebonding interfaces between the first bonding pads 988 and the secondbonding pads 788. Each second bonding pad 788 can be laterallysurrounded by a second pad-level dielectric layer 771, which includes acombination of the second pad-level silicon-containing dielectric layer772 and a second portion 979B of the pad-level polymer material layer979 located on the second-semiconductor-die side of the horizontal planeincluding the bonding interfaces between the first bonding pads 988 andthe second bonding pads 788. Depending on the degree of intermixing ofthe first polymer material and the second polymer material in thepad-level polymer material layer 979, the pad-level polymer materiallayer 979 may have a homogeneous composition throughout, or may have avertically-graded composition in which the molecular percentage of thefirst polymer material decreases with a vertical distance from the firstsubstrate 908, and the molecular percentage of the second polymermaterial decreases with a vertical distance from the second substrate708.

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

Referring to FIG. 34, an alternative embodiment of the firstsemiconductor die 900 according to the third embodiment of the presentdisclosure may be the same as the first semiconductor die 900illustrated in FIG. 32. In one embodiment, the physically exposedsurfaces of the first bonding pads 988 may have a dishing feature, i.e.,a feature in which a center portion of a top surface of a first bondingpad 988 is more recessed relative to a peripheral portion of the topsurface of the first bonding pad 988 such that the top surface of thefirst bonding pad 988 has a concave shape. The vertical recess distanceof the center portion of a first bonding pad 988 relative to theperipheral portion of the first bonding pad 988 depends on the lateraldimension of the first bonding pad 988 and the process parameters of thechemical mechanical planarization process. For example, the verticalrecess distance of the center portion of a first bonding pad 988relative to the peripheral portion of the first bonding pad 988 may bein a range from 1 nm to 100 nm, such as from 3 nm to 30 nm, althoughlesser and greater vertical recess distances may be employed.

Referring to FIG. 35, a first self-assembly material (SAM) layer 986including a first SAM material can be selectively formed on eachphysically exposed surface of the first bonding pads 988 whilesuppressing deposition of the first SAM material on the first polymermaterial layer 974. The first SAM material may include any material thatself-assembles on metallic surfaces without assembly on dielectricsurfaces such as the surfaces of the first polymer material layer 974.In one embodiment, the first SAM material can be any material that maybe employed for the first carbon-based oxidation barrier layer 992described above. In one embodiment, the first SAM material may have ahead group that is attached to the physically exposed surfaces of thefirst bonding pads 988 and a first tail group that is located on theopposite side of the head group and is physically exposed. The first SAMlayer 986 can include a monolayer of the first SAM material. The firstSAM material can include a material that can retard oxidation of theunderlying metallic material(s) of the first bonding pads 988 during thesubsequent bonding process.

Referring to FIG. 36, an alternative configuration of a secondsemiconductor die 700 is illustrated, which can be derived from thesecond semiconductor die 700 of FIG. 3 by omitting the processing stepsfor formation of the second bonding dielectric layer 770 and the secondbonding pads 788, and by performing the processing steps of FIGS. 34 and35 while making suitable modifications. Particularly, the second polymermaterial layer 774 of the third embodiment of the present disclosureincludes a second polymer material that is miscible with the firstpolymer material of the first polymer material layer 974. The firstpolymer material and the second polymer material comprise a combinationof the two miscible polymer materials, which may be selected from acombination of SMA and TGDDM, a combination of PP-g-MA and TGDDM, or acombination of PMMA and PVDF. If the first polymer material comprisesSMA or PP-g-MA, then the second polymer material may comprise TGDDM. Ifthe first polymer material comprises TGDDM, then the second polymermaterial may comprise SMA or PP-g-MA. If the first polymer materialcomprises PMMA, then the second polymer material may comprise PVDF. Ifthe first polymer material comprises PVDF, then the second polymermaterial may comprise PMMA. Any miscible combination of two polymermaterials may be employed for the first polymer material and the secondpolymer material.

The second pad-level silicon-containing dielectric layer 772 can bedeposited by chemical vapor deposition, spin coating, and/or physicalvapor deposition, and may have a thickness in a range from 50 nm to6,000 nm, such as from 100 nm to 3,000 nm, although lesser and greaterthicknesses can also be employed. The second polymer material layer 774may be formed, for example, by spin coating and curing. The thickness ofthe second polymer material layer 774 can be in a range from 200 nm to6,000 nm, such as from 500 nm to 2,500 nm, although lesser and greaterthicknesses can also be employed. The thickness of the second pad-leveldielectric layer 771 can be in a range from 1,000 nm to 10,000 nm,although lesser and greater thicknesses can also be employed.

Generally, the second semiconductor die 700 comprises a second substrate708, second semiconductor devices 720, and second bonding pads 788 thatare electrically connected to a respective node of the secondsemiconductor devices 720 and laterally surrounded by a second polymermaterial layer 774 including a second polymer material which is misciblewith the first polymer material.

A second SAM material having a second tail group can be selectivelyformed on physically exposed surfaces of the second bonding pads 788while suppressing deposition of the second SAM material on the secondpolymer material layer 774. In one embodiment, the second tail group hasaffinity to the first tail group, which facilitates alignment of thesecond bonding pads 788 to the first bonding pads 988 during asubsequent alignment step prior to bonding the second bonding pads 788to the first bonding pads 988.

Referring to FIG. 37, the processing steps of FIG. 33 can be performedto bond the second bonding pads 788 to the first bonding pads 988, andto induce intermixing of the first polymer material and the secondpolymer material. The anneal temperature may be selected based on thecomposition of the second bonding pads 788 and the first bonding pads988, and based on the compositions of the first polymer material and thesecond polymer material. For example, if the second bonding pads 788 andthe first bonding pads 988 include metal fill portions that consistessentially of copper, the anneal temperature may be in a range from 200degrees Celsius to 400 degrees Celsius. The first SAM layers 986 and thesecond SAM layers 786 retard oxidation of the metallic materials of thefirst bonding pads 988 and the second bonding pads 788 up to therespective thermal decomposition temperature, which is lower than theanneal temperature. The first SAM layers 986 and the second SAM layers786 are decomposed during the anneal temperature as the temperaturerises above the decomposition temperatures.

Mixing the first polymer material and the second polymer materialinduces formation of a pad-level polymer material layer 979 including ablend of first polymer material and the second polymer material.Generally, the blend of the first polymer material and the secondpolymer material can be formed by annealing the first polymer materiallayer 974 and the second polymer material layer 774 at an elevatedtemperature in a range from 200 degrees Celsius to 400 degrees Celsius,such as from 200 degrees Celsius to 250 degrees Celsius.

Each first bonding pad 988 can be laterally surrounded by a firstpad-level dielectric layer 971, which includes a combination of thefirst pad-level silicon-containing dielectric layer 972 and a firstportion 979A of the pad-level polymer material layer 979 located on thefirst-semiconductor-die side of the horizontal plane including thebonding interfaces between the first bonding pads 988 and the secondbonding pads 788. Each second bonding pad 788 can be laterallysurrounded by a second pad-level dielectric layer 771, which includes acombination of the second pad-level silicon-containing dielectric layer772 and a second portion 979B of the pad-level polymer material layer979 located on the second-semiconductor-die side of the horizontal planeincluding the bonding interfaces between the first bonding pads 988 andthe second bonding pads 788. Depending on the degree of intermixing ofthe first polymer material and the second polymer material in thepad-level polymer material layer 979, the pad-level polymer materiallayer 979 may have a homogeneous composition throughout, or may have avertically-graded composition in which the molecular percentage of thefirst polymer material decreases with a vertical distance from the firstsubstrate 908, and the molecular percentage of the second polymermaterial decreases with a vertical distance from the second substrate708.

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

Referring to FIGS. 28-37 and according to various embodiments of thepresent disclosure, a bonded assembly (900, 700) is provided, whichcomprises: a first semiconductor die 900 comprising a first substrate908, first semiconductor devices 920, and first bonding pads 988 thatare electrically connected to a respective node of the firstsemiconductor devices 920; a second semiconductor die 700 comprising asecond substrate 708, second semiconductor devices 720, and secondbonding pads 788 that are electrically connected to a respective node ofthe second semiconductor devices 720; and a pad-level polymer materiallayer 979 including a blend of two miscible polymer materials laterallysurrounding the first bonding pads 988 and the second bonding pads 788.

In one embodiment, the bonded assembly (900, 700) further comprises: afirst pad-level silicon-containing dielectric layer 972 laterallysurrounding portions of the first bonding pads 988 that are proximal tothe first substrate 908; and a second pad-level silicon-containingdielectric layer 772 laterally surrounding portions of the secondbonding pads 788 that are proximal to the second substrate 708. In oneembodiment, the pad-level polymer material layer 979 contacts portionsof sidewalls of the first bonding pads 988 that are distal from thefirst substrate 908, and contacts portions of sidewalls of the secondbonding pads 788 that are distal from the second substrate 708. Thepad-level polymer material layer 979 can contact horizontal surfaces ofthe first pad-level silicon-containing dielectric layer 972 and thesecond pad-level silicon-containing dielectric layer 772, and may have ahomogeneous composition or a compositional gradient therein. In oneembodiment, the pad-level polymer material layer 979 has a compositionalgradient such that a concentration of a first polymer material of thetwo miscible polymer materials decreases with a distance from the firstsubstrate 908.

In one embodiment, the two miscible polymer materials can be selectedfrom: a combination of styrene maleic anhydride (SMA) and tetra-glycidylether of diphenyl diamino methane (TGDDM); a combination of maleicanhydride grafted polypropylene (PP-g-MA) and tetra-glycidyl ether ofdiphenyl diamino methane (TGDDM); or a combination of poly(methylmethacrylate) (PMMA) and polyvinylidene fluoride (PVDF).

Referring to FIG. 38, first semiconductor die 900 according to a fourthembodiment of the present disclosure is illustrated, which may be thesame as the first semiconductor die 900 of FIG. 21.

Referring to FIG. 39, the processing steps of FIG. 22 can be performedto form first bonding pads 988. Generally, a first semiconductor die 900is provided, which comprises a first substrate 908, first semiconductordevices 920, and first bonding pads 988 that are electrically connectedto a respective node of the first semiconductor devices 920 andlaterally surrounded by a first pad-level dielectric layer 971. Thepad-level dielectric layer 971 comprises a stack of a first pad-levelsilicon-containing dielectric layer 972 and a first polymer materiallayer 974 including a first polymer material, such as polyimide.

Referring to FIG. 40, a surface portion of the first polymer materiallayer 974 can be patterned to form first polymer hairs (i.e., flexible,micron sized pillars) 974H. For example, the surface portion of thefirst polymer material layer 974 can be patterned by stamping employinga stamp that has a pattern in areas located outside the areas of thefirst bonding pads 988. The stamp can include vertical pillar cavitiesoutside the areas of the first bonding pads 988, and can have recessedsurfaces in the areas of the first bonding pads 988 to avoid contactwith the first bonding pads 988. Alternatively, the first polymer hairs947H may be formed by photolithography and etching.

In one embodiment, the first polymer hairs 974H extend from a horizontalsurface of the first polymer material layer 974, and provides enhancedadhesion to a second pad-level dielectric layer of a secondsemiconductor die through Van der Waals force and/or through capillaryinteraction during a bonding process to be subsequently performed. Ifthe first polymer hairs 974H are cylindrical (i.e., have a substantiallycircular horizontal cross-sectional shape), then they each may have adiameter from 0.1 microns to 10 microns, such as 0.2-4 microns, a heightfrom 0.1 microns to 5 microns, such as 0.15-2 microns, and periodicityfrom 0.2 microns to 10 microns, such as 0.4-4.5 microns. If the hairs974H are not cylindrical (e.g., have a polygonal, oval or irregularshape), then they may have a maximum width from 0.1 microns to 10microns, such as 0.2-4 microns. In one embodiment, the first polymerhairs 974H have as an average center-to-center nearest neighbor distancein a range from 0.1 micron to 10 microns, and have an average width in arange from 0.01 times the average center-to-center nearest neighbordistance to 0.3 times the average center-to-center nearest neighbordistance. The first polymer hairs 974H may have an average length in arange from 3 times the average width to 1,000 times the average width,such as from 6 times the average width to 30 times the average width.

Referring to FIG. 41, a second semiconductor die 700 according to thefourth embodiment of the present disclosure is illustrated, which can bestructurally the same as the second semiconductor die 700 of FIG. 32except that the second polymer material of the second polymer materiallayer 774 can be any polymer material. In other words, the selection ofthe second semiconductor material in the second polymer material layer774 is not limited by the material composition of the first polymermaterial in the first polymer material layer 974 or the first polymerhairs 974H.

Referring to FIG. 42, the first semiconductor die 900 of FIG. 40 and thesecond semiconductor die 700 of FIG. 41 are oriented such that each ofthe first bonding pads 988 faces a respective one of the second bondingpads 788. The second semiconductor die 700 and the first semiconductordie 900 are brought into contact such that the second pad-leveldielectric layer 771 contacts the first polymer hairs 974H. The firstsemiconductor die 900 and the second semiconductor die 700 may belaterally aligned such that each second bonding pad 788 contacts arespective one of the first bonding pads 988. In one embodiment, thepattern of the second bonding pads 788 may be a mirror image of thepattern of the first bonding pads 988 with optional differences in thesize of bonding pads between the first semiconductor die 900 and thesecond semiconductor die 700. In one embodiment, the first bonding pads988 and the corresponding second bonding pads 788 may have the same size(i.e., lateral width). In another embodiment, the first bonding pads 988and the corresponding second bonding pads 788 may have different sizes.In one embodiment, areal overlap between each facing pair of a firstbonding pad 988 and a second bonding pad 788 may be at least 80%, and/orat least 90%, such as 90 to 100%, of the area of the smaller one of thefirst bonding pad 988 and the second bonding pad 788.

Subsequently, the second bonding pads 788 may be bonded to the firstbonding pads 988 by performing an anneal process that inducesmetal-to-metal bonding between the second bonding pads 788 and the firstbonding pads 988. The anneal temperature may be selected based on thecomposition of the second bonding pads 788 and the first bonding pads988. For example, if the second bonding pads 788 and the first bondingpads 988 include metal fill portions that consist essentially of copper,the anneal temperature may be in a range from 150 degrees Celsius to 400degrees Celsius. The first polymer hairs 974H adhere to the surface ofthe second polymer material layer 774 within the second pad-leveldielectric layer 771 through Van der Waals force and/or throughcapillary interaction.

The first polymer hairs 974H can collectively provide significantadhesion to the second pad-level dielectric layer 771. While each firstpolymer hair 974H produces miniscule force on the order of 10⁻⁷ Newtons,the number of first polymer hairs 974H that can be packed within thearea of 1 cm² can be in a range from 10⁶ to 10¹⁰. Thus, the adhesiveforce of the first polymer hair 974H can be in a range from 0.1 Newtonper cm² to 1,000 Newtons per cm², such as 1 to 5 Newtons per cm², or1,000 Pascal to 1.0×10⁷ Pascal.

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

Referring to FIG. 43, an alternate configuration of the secondsemiconductor die 700 according to the fourth embodiment of the presentdisclosure is illustrated. The alternate configuration of the secondsemiconductor die 700 can be derived from the second semiconductor die700 of FIG. 41 by patterning the second polymer material layer 774,thereby forming the second polymer hairs 774H. The same stamping orphotolithography and etching method can be employed as the methodemployed at the processing steps of FIG. 40. The second polymer hairs774H can have the same range of dimensions for the averagecenter-to-center nearest neighbor distance, the average width, and theaverage length as the first polymer hairs of 974H.

Referring to FIG. 44, a first alternative configuration of the fourthexemplary structure is illustrated. In this case, the firstsemiconductor die 900 of FIG. 39 and the second semiconductor die 700 ofFIG. 43 including the second polymer hairs 774H can be bonded to eachother by performing the processing steps of FIG. 42. The second polymerhairs 774H can collectively provide significant adhesion to the firstpad-level dielectric layer 971 through Van der Waals force and/orthrough capillary interaction.

Referring to FIG. 45, a second alternative configuration of the fourthexemplary structure is illustrated. In this case, the firstsemiconductor die 900 of FIG. 40 including the first polymer hairs 974Hand the second semiconductor die 700 of FIG. 43 including the secondpolymer hairs 774H can be bonded to each other by performing theprocessing steps of FIG. 42. The first polymer hairs 974H cancollectively provide significant adhesion to the second pad-leveldielectric layer 771 through Van der Waals force and/or throughcapillary interaction. The second polymer hairs 774H can collectivelyprovide significant adhesion to the first pad-level dielectric layer 971through Van der Waals force and/or through capillary interaction.Further, the first polymer hairs 974H and the second polymer hairs 774Hcan provide mutual adhesion to each other through Van der Waals forceand/or through capillary interaction. Enmeshing of the first polymerhairs 974H with the second polymer hairs 774H can further enhanceadhesion between the first polymer hairs 974H with the second polymerhairs 774H.

While embodiments described above employ two polymer material layers(974, 774) provided on two different semiconductor dies (900, 700),embodiments of the present disclosure can be performed employing onlyone polymer material layer provided on a semiconductor die. Referring toFIG. 46, an alternative embodiment of the second exemplary structure isillustrated, which can be formed employing the first semiconductor die900 of FIG. 40, and by employing a second semiconductor die 700 in whicha second pad-level dielectric layer excludes a polymer layer andcontains only the second pad-level silicon-containing dielectric layer772 (such as a silicon oxide layer).

In this case, the first bonding pads 988 are bonded to the secondbonding pads 788 while the first polymer hairs 974H contact the secondpad-level silicon-containing dielectric layer 772. Thus, the firstpolymer hairs 974H can contact the material of the second pad-levelsilicon-containing dielectric layer 772 (such as silicon oxide) whilethe first bonding pads 988 are bonded to the second bonding pads 788.The first polymer hairs 974H can collectively provide significantadhesion to the second pad-level silicon-containing dielectric layer 772through Van der Waals force and/or through capillary interaction.

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

Optionally, a first self-assembled monolayer (SAM) material having afirst tail group can be selectively formed on physically exposedsurfaces of the first bonding pads 988 while suppressing deposition ofthe first SAM material on the first polymer material layer 974 and/orthe first polymer hairs 974H prior to the bonding process. Additionallyor alternatively, a second SAM material having a second tail group canbe selectively formed on physically exposed surfaces of the secondbonding pads 788 while suppressing deposition of the second SAM materialon the second polymer material layer 774 and/or the second polymer hairs774H. In some embodiment, the second tail group can have affinity to thefirst tail group to facilitate alignment of the second bonding pads 788to the first bonding pads 988. The first SAM material and the second SAMmaterial can be decomposed during bonding.

Referring to FIGS. 38-46 and according to various embodiments of thepresent disclosure, a bonded assembly (900, 700) is provided, whichcomprises: a first semiconductor die 900 comprising a first substrate908, first semiconductor devices 920, and first bonding pads 988 thatare electrically connected to a respective node of the firstsemiconductor devices 920 and laterally surrounded by a first pad-leveldielectric layer 971, wherein the first pad-level dielectric layer 971comprises a first polymer material layer 974 and first polymer hairs974H extending from a horizontal surface of the first polymer materiallayer 974, having a diameter or maximum width from 0.1 microns to 10microns, a height from 0.1 microns to 5 microns, and periodicity from0.2 microns to 10 microns; and a second semiconductor die 700 comprisinga second substrate 708, second semiconductor devices 720, and secondbonding pads 788 that are electrically connected to a respective node ofthe second semiconductor devices 720 and laterally surrounded by asecond pad-level dielectric layer 971, wherein each of the secondbonding pads 788 is bonded to a respective one of the first bonding pads988, and the first polymer hairs 974H contact the second pad-leveldielectric layer 771.

In one embodiment, the first polymer hairs have the diameter or maximumwidth from 0.2 microns to 4 microns, the height from 0.15 microns to 2microns, and the periodicity from 0.4 microns to 4.5 microns. In oneembodiment, the first pad-level dielectric layer comprises a firstpad-level silicon-containing dielectric layer laterally surroundingportions of the first bonding pads that are proximal to the firstsubstrate, and contacting the first polymer hairs. In anotherembodiment, the second pad-level dielectric layer comprises a secondpolymer material layer.

Referring to FIG. 47, a first semiconductor die 900 according to thefifth embodiment of the present disclosure is illustrated, which can bederived from the first semiconductor die 900 of FIG. 10 by forming afirst pad-level silicon-containing dielectric layer 972. The firstpad-level silicon-containing dielectric layer 972 includes asilicon-containing dielectric material such as silicon oxide, siliconnitride, silicon carbon nitride, silicon oxynitride, or any otherdielectric material that includes silicon atoms at an atomic percentagegreater than 10%. The first pad-level silicon-containing dielectriclayer 972 can be deposited by chemical vapor deposition, spin coating,and/or physical vapor deposition, and may have a thickness in a rangefrom 1,000 nm to 10,000 nm, although lesser and greater thicknesses canalso be employed.

Referring to FIG. 48, a first photoresist layer (not shown) can beapplied over the first pad-level silicon-containing dielectric layer972, and can be lithographically patterned to form an array of discreteopenings in areas that overlie a respective one of the topmost ones ofthe first metal interconnect structures 980, i.e., a subset of the firstmetal interconnect structures 980 that is in contact with the bottomsurface of the first pad-level silicon-containing dielectric layer 972.The openings in the photoresist layer can have the shapes of bondingpads to be subsequently formed. Each opening in the photoresist layercan have a horizontal cross-sectional shape of a polygon, a circle, anellipse, or another two-dimensional curvilinear shape having a closedperiphery. For example, the openings in the photoresist layer can haverectangular shapes. Each side of the rectangular shapes may have alateral dimension in a range from 2 microns to 60 microns, such as from5 micron to 30 microns, although lesser and greater lateral dimensionscan also be employed.

An anisotropic etch process can be performed to transfer the pattern inthe first photoresist layer through the first pad-levelsilicon-containing dielectric layer 972. First pad cavities 975 areformed through the first pad-level silicon-containing dielectric layer972. A top surface of a respective topmost one of the first metalinterconnect structures 980 is physically exposed at the bottom of eachfirst pad cavity 975. The first photoresist layer can be subsequentlyremoved, for example, by ashing.

Referring to FIG. 49, a first metallic barrier liner layer 983L can bedeposited by a conformal or a non-conformal deposition process. Thefirst metallic barrier liner layer 983L includes a metallic barriermaterial that functions as a diffusion barrier material for metallicmaterials, moisture, and impurity atoms. For example, the first metallicbarrier liner layer 983L can include TiN, TaN, WN, TiC, TaC, WC, or analloy of a stack thereof. The first metallic barrier liner layer 983Lmay be deposited by physical vapor deposition and/or by chemical vapordeposition. The thickness of vertically-extending portions (or taperedportions) of the first metallic barrier liner layer 983L that are incontact with sidewalls of the first pad-level silicon-containingdielectric layer 972 can be in a range from 3 nm to 100 nm, such as from6 nm to 50 nm, although lesser and greater thicknesses can also beemployed.

Referring to FIG. 50, a first metallic fill material layer 984L can bedeposited on the first metallic barrier liner 983L. The first metallicfill material layer 984L includes a metallic material that can providemetal-to-metal bonding at an elevated temperature less than 500 degreesCelsius, such as less than 450 degrees Celsius. For example, the firstmetallic fill material layer 984L can include, and/or can consistessentially of, copper or a copper-containing metallic alloy material.The first metallic fill material layer 984L can be deposited by physicalvapor deposition, chemical vapor deposition, electroplating, and/orelectroless plating. For example, the first metallic fill material layer984L can be formed by depositing a metal seed layer by physical vapordeposition, and electroplating an additional metal layer on the metalseed layer. The thickness of the first metallic fill material layer 984Lcan be selected such that all volumes of the first pad cavities 975 arefilled with the metallic material(s) of the first metallic fill materiallayer 984L.

Referring to FIG. 51, a planarization process can be performed to removeportions of the first metallic fill material layer 984L and the firstmetallic barrier liner layer 983L from above the horizontal planeincluding the top surface of the first pad-level silicon-containingdielectric layer 972. For example, a chemical mechanical planarizationprocess can be performed to remove the portions of the first metallicfill material layer 984L and the first metallic barrier liner layer 983Lthat overlie the horizontal plane including the top surface of the firstpad-level silicon-containing dielectric layer 972. Each remainingportion of the first metallic fill material layer 984L in a respectivefirst pad cavity 975 constitutes a first metallic fill material portion984. Each remaining portion of the first metallic barrier liner layer983L in a respective first pad cavity 975 constitutes a first metallicbarrier liner 983. Each contiguous combination of a first metallicbarrier liner 983 and a first metallic fill material portion 984constitutes a first bonding pad 988, which fills a respective one of thefirst pad cavities 975.

Generally, the first semiconductor die 900 comprises a first substrate908, first semiconductor devices 920, first bonding pads 988 that areelectrically connected to a respective node of the first semiconductordevices 920 and laterally surrounded by a first pad-level dielectriclayer as embodied as the first pad-level silicon-containing dielectriclayer 972.

Referring to FIG. 52, the dielectric material of the first pad-levelsilicon-containing dielectric layer 972 can be vertically recessed tophysically expose sidewalls of the first bonding pads 988. For example,a wet etch process can be performed to vertically recess the horizontaltop surface of the first pad-level silicon-containing dielectric layer972. In an illustrative example, if the first pad-levelsilicon-containing dielectric layer 972 includes silicon oxide, a wetetch process employing hydrofluoric acid can be performed to verticallyrecess the first pad-level silicon-containing dielectric layer 972. Inanother example, if the first pad-level silicon-containing dielectriclayer 972 includes silicon nitride, a wet etch process employing hotphosphoric acid can be performed to vertically recess the firstpad-level silicon-containing dielectric layer 972. The vertical recessdistance of the etch process can be in a range from 200 nm to 6,000 nm,such as from 500 nm to 2,500 nm, although lesser and greater thicknessescan also be employed.

Referring to FIG. 53, a first polymer material can be applied over thefirst pad-level silicon-containing dielectric layer 972 to form a firstpolymer material layer 974. The first polymer material may comprise anysuitable polymer material which may be removed selective to thesilicon-containing dielectric layer 972. For example, the first polymermaterial may comprise functionalized polynorbornene (“PNB”),polycarbonate, polyimide, polyaldehyde, etc. The first polymer materialcan be applied over the first pad-level silicon-containing dielectriclayer 972 by spin coating. Excess portions of the first polymer materialmay be removed from above the horizontal plane including the topsurfaces of the first bonding pads 988, for example, by mechanicalsweeping and/or by adjusting the spin speed of a wafer containing thefirst semiconductor die 900. Alternatively, excess portions of the firstpolymer material may be removed from above the horizontal planeincluding the top surfaces of the first bonding pads 988 by stampingwith a blanket stamp including a flat surface, which stops at thehorizontal plane including the top surfaces of the first bonding pads988. Alternatively, the first polymer material can optionally be cured,and a chemical mechanical planarization process can be performed toremove portions of the first polymer material from above the horizontalplane including the top surfaces of the first bonding pads 988.

A first semiconductor die 900 is provided, which comprises a firstsubstrate 908, first semiconductor devices 920, and first bonding pads988 that are electrically connected to a respective node of the firstsemiconductor devices 920 and laterally surrounded by a first pad-leveldielectric layer 971. The first pad-level dielectric layer 971 comprisesa stack of a first pad-level silicon-containing dielectric layer 972 anda first polymer material layer 974. While the structure illustrated inFIG. 53 can be employed as a first semiconductor die 900 according tothe fifth embodiment of the present disclosure, the structureillustrated in FIG. 53 may be employed as a first semiconductor die 900in other embodiments, such as the first semiconductor die 900 of FIG.22, the first semiconductor die 900 of FIG. 31, or the firstsemiconductor die 900 of FIG. 39. Alternatively, the first semiconductordie 900 of FIG. 22, the first semiconductor die 900 of FIG. 31, or thefirst semiconductor die 900 of FIG. 39 may be employed in lieu of thefirst semiconductor die 900 of FIG. 53.

Referring to FIG. 54, the processing steps of FIGS. 47-53 can beperformed while making suitable modifications to form the secondsemiconductor die 700 of FIG. 54. Specifically, a second pad-levelsilicon-containing dielectric layer 772 can be formed over the secondinterconnect-level dielectric layers 760 and the second metalinterconnect structures 780 of the second semiconductor die 700 of FIG.3 instead of forming the second bonding dielectric layer 770 and thesecond bonding pads 788. The second pad-level silicon-containingdielectric layer 772 may have any of the material composition that canbe employed for the first pad-level silicon-containing dielectric layer972. The second pad-level silicon-containing dielectric layer 772 canhave a thickness in a range from 1,000 nm to 10,000 nm, although lesserand greater thicknesses can also be employed. Subsequently, theprocessing steps of FIGS. 48-53 can be performed while making suitablemodifications to form the second semiconductor die 700.

A second semiconductor die 700 is provided, which comprises a secondsubstrate 708, second semiconductor devices 720, and second bonding pads788 that are electrically connected to a respective node of the secondsemiconductor devices 720 and laterally surrounded by a second pad-leveldielectric layer 771. The second pad-level dielectric layer 771comprises a stack of a second pad-level silicon-containing dielectriclayer 772 and a second polymer material layer 774 including a secondpolymer material. While the structure illustrated in FIG. 54 can beemployed as a second semiconductor die 700 according to the fifthembodiment of the present disclosure, the structure illustrated in FIG.54 may be employed as any second semiconductor die 700 in otherembodiments in which the second pad-level dielectric layer 771 comprisesa stack of a second pad-level silicon-containing dielectric layer 772and a second polymer material layer 774 including a second polymermaterial. Alternatively, any second semiconductor die 700 in otherembodiments in which the second pad-level dielectric layer 771 comprisesa stack of a second pad-level silicon-containing dielectric layer 772and a second polymer material layer 774 including a second polymermaterial may be employed in lieu of the second semiconductor die 700 ofFIG. 54.

Referring to FIG. 55, the first semiconductor die 900 and the secondsemiconductor die 700 are oriented such that each of the first bondingpads 988 faces a respective one of the second bonding pads 788. Thesecond semiconductor die 700 and the first semiconductor die 900 arebrought into contact such that the second polymer material layer 774contacts the first polymer material layer 974. The first semiconductordie 900 and the second semiconductor die 700 may be laterally alignedsuch that each second bonding pad 788 contacts a respective one of thefirst bonding pads 988. In one embodiment, the pattern of the secondbonding pads 788 may be a mirror image of the pattern of the firstbonding pads 988 with optional differences in the size of bonding padsbetween the first semiconductor die 900 and the second semiconductor die700. In one embodiment, the first bonding pads 988 and the correspondingsecond bonding pads 788 may have the same size (i.e., lateral width). Inanother embodiment, the first bonding pads 988 and the correspondingsecond bonding pads 788 may have different sizes. In one embodiment,areal overlap between each facing pair of a first bonding pad 988 and asecond bonding pad 788 may be at least 80%, and/or at least 90%, such as90 to 100%, of the area of the smaller one of the first bonding pad 988and the second bonding pad 788.

Referring to FIG. 56, the second bonding pads 788 may be bonded to thefirst bonding pads 988 by performing an anneal process that inducesmetal-to-metal bonding between the second bonding pads 788 and the firstbonding pads 988 while the first polymer material layer 974 and thesecond polymer material layer 774 are gradually decomposed. The annealtemperature may be selected based on the composition of the secondbonding pads 788 and the first bonding pads 988. For example, if thesecond bonding pads 788 and the first bonding pads 988 include metalfill portions that consist essentially of copper, the anneal temperaturemay be in a range from 150 degrees Celsius to 400 degrees Celsius.

Generally, the first polymer material and the second polymer materialmay remain in the bonded assembly (900, 700) if the decompositiontemperatures of the first polymer material and the second polymermaterial are above the anneal temperature employed to bond the secondbonding pads 788 to the first bonding pads 988. Conversely, the firstpolymer material and the second polymer material may be removed from thebonded assembly (900, 700) if the decomposition temperatures of thefirst polymer material and the second polymer material are below theanneal temperature employed to bond the second bonding pads 788 to thefirst bonding pads 988.

In an illustrative example, polyphthalaldehyde has a decompositiontemperature of about 120 degrees Celsius, polypropylene carbonate has adecomposition temperature in a range from 200 degrees Celsius to 300degrees Celsius, functionalized polynorbornene has a decompositiontemperature in a range from 425 degrees Celsius to 450 degrees Celsius,and polyimide has a decomposition temperature in a range from 500degrees to 600 degrees. Thus, if the first polymer material and thesecond polymer material include polyphthalaldehyde and/or polypropylenecarbonate and if the anneal temperature that induces metal-to-metalbonding between the first bonding pads 988 and the second bonding pads788 is 400 degrees Celsius, the first polymer material layer 974 and thesecond polymer material layer 774 can be removed during bonding. In suchcases, the first polymer material layer 974 and the second polymermaterial layer 774 can retard oxidation of the first bonding pads 988and the second bonding pads 788 until the first polymer material and thesecond polymer material are thermally decomposed. If the first polymermaterial and the second polymer material include functionalizedpolynorbornene and/or polyimide and if the anneal temperature thatinduces metal-to-metal bonding between the first bonding pads 988 andthe second bonding pads 788 is 400 degrees Celsius, the first polymermaterial layer 974 and the second polymer material layer 774 can remainafter the bonding process and provide additional bonding strengthbetween the first semiconductor die 900 and the second semiconductor die700.

Optionally, additional process steps of FIG. 9 may be performed to formthrough-substrate contact via structures 714 and/or additional bondingstructures.

Optionally, a first self-assembled monolayer (SAM) material having afirst tail group can be selectively formed on physically exposedsurfaces of the first bonding pads 988 while suppressing deposition ofthe first SAM material on the first polymer material layer 974 prior tothe bonding process. Additionally or alternatively, a second SAMmaterial having a second tail group can be selectively formed onphysically exposed surfaces of the second bonding pads 788 whilesuppressing deposition of the second SAM material on the second polymermaterial layer 774 prior to the bonding process. In some embodiment, thesecond tail group can have affinity to the first tail group tofacilitate alignment of the second bonding pads 788 to the first bondingpads 988. The first SAM material and the second SAM material can bedecomposed during bonding.

Generally, if the thermal decomposition temperatures of the firstpolymer material and the second polymer material are lower than theelevated temperature of an anneal process in which the second bondingpads 788 are bonded to the first bonding pads 988, removal of the firstpolymer material layer 974 and the second polymer material layer 774 canbe performed during the anneal process, i.e., during the bondingprocess. An air gap 999 is formed in the space from which the firstand/or second polymer material layers are removed. The air gap 999 islocated between laterally adjacent bonding pads.

Referring to FIGS. 47-56 and according to various embodiments of thepresent disclosure, a bonded assembly (900, 700) is provided, whichcomprises: a first semiconductor die 900 comprising a first substrate908, first semiconductor devices 920, and first bonding pads 988 thatare electrically connected to a respective node of the firstsemiconductor devices 920 and laterally surrounded by a first pad-leveldielectric layer (as embodied as the first pad-level silicon-containingdielectric layer 972), wherein the first pad-level dielectric layercomprises a first distal surface 972D that is more proximal to the firstsubstrate 908 than distal surfaces 988D of the first bonding pads 988are to the first substrate 908; and a second semiconductor die 700comprising a second substrate 708, second semiconductor devices 720, andsecond bonding pads 788 that are electrically connected to a respectivenode of the second semiconductor devices 720 and laterally surrounded bya second pad-level dielectric layer (as embodied as the first pad-levelsilicon-containing dielectric layer 772), wherein each of the secondbonding pads 788 is bonded to a respective one of the first bonding pads988, the second pad-level dielectric layer comprises a second distalsurface 772D that is more proximal to the second substrate 708 thandistal surfaces 788D of the second bonding pads 788 are to the secondsubstrate 708, and an air gap 999 is present between the first pad-leveldielectric material layer and the second pad-level dielectric layer, andthe air gap laterally surrounds each bonded pair of the first bondingpad 988 and second bonding pad 788.

In one embodiment, the proximal surfaces 988P of the first bonding pads988 can be located within a same horizontal plane as the proximalsurface 972P of the first pad-level dielectric layer (which comprisesthe first pad-level silicon-containing dielectric layer 972) that is incontact with first interconnect-level dielectric layers 960. In oneembodiment, the proximal surfaces 788P of the second bonding pads 788can be located within a same horizontal plane as the proximal surface772P of the second pad-level dielectric layer (which comprises thesecond pad-level silicon-containing dielectric layer 772) that is incontact with second interconnect-level dielectric layers 760. The distalsurfaces 988D of the first bonding pads 988 are in contact with thedistal surfaces 788D of the second bonding pads 788, and are locatedwithin a horizontal plane including the bonding interfaces between thefirst bonding pads 988 and the second bonding pads 788.

In one embodiment, each of the first bonding pads 988 and the secondbonding pads 788 comprises a respective metallic barrier liner (982,783) including a respective metallic nitride material and a respectivemetallic fill material portion (984, 784) laterally surrounded by therespective metallic barrier liner (982, 783); and each of the metallicbarrier liners (982, 783) comprises a respective outer sidewall thatincludes a distal segment that is physically exposed to the air gap 999and a proximal segment that contacts one of the first pad-leveldielectric layer and the second pad-level dielectric layer.

The air gap 999 provides an effective dielectric constant of about1.00059, and reduces capacitive coupling between the bonded pairs of thefirst bonding pads 988 and the second bonding pads 788. The RC delaythrough the bonded pairs of the bonding pads 988 and the second bondingpads 788 can be minimized by the air gap 999, which provides lowdielectric constant, and thus, reduces the capacitive coupling ofsignals.

The various embodiments of the present disclosure can be employed toprovide various bonded assemblies (900, 700) in which at least onepolymer material layer and/or polymer hairs can enhance bonding strengthbetween the first semiconductor die 900 and the second semiconductor die700, or low capacitive coupling between adjacent bonded pairs of thebonding pads 988 and the second bonding pads 788 is provided through anair gap 999.

Although the foregoing refers to particular embodiments, it will beunderstood that the disclosure is not so limited. It will occur to thoseof ordinary skill in the art that various modifications may be made tothe disclosed embodiments and that such modifications are intended to bewithin the scope of the disclosure. Compatibility is presumed among allembodiments that are not alternatives of one another. The word“comprise” or “include” contemplates all embodiments in which the word“consist essentially of” or the word “consists of” replaces the word“comprise” or “include,” unless explicitly stated otherwise. Where anembodiment using a particular structure and/or configuration isillustrated in the present disclosure, it is understood that the presentdisclosure may be practiced with any other compatible structures and/orconfigurations that are functionally equivalent provided that suchsubstitutions are not explicitly forbidden or otherwise known to beimpossible to one of ordinary skill in the art. All of the publications,patent applications and patents cited herein are incorporated herein byreference in their entirety.

1. A bonded assembly, comprising: a first semiconductor die comprising afirst substrate, first semiconductor devices, and first bonding padsthat are electrically connected to a respective node of the firstsemiconductor devices and laterally surrounded by a first pad-leveldielectric layer, wherein the first pad-level dielectric layer comprisesa first polymer material layer and first polymer hairs extending from ahorizontal surface of the first polymer material layer, having adiameter or maximum width from 0.1 microns to 10 microns, a height from0.1 microns to 5 microns, and a periodicity from 0.2 microns to 10microns; and a second semiconductor die comprising a second substrate,second semiconductor devices, and second bonding pads that areelectrically connected to a respective node of the second semiconductordevices and laterally surrounded by a second pad-level dielectric layer,wherein each of the second bonding pads is bonded to a respective one ofthe first bonding pads, and the first polymer hairs contact the secondpad-level dielectric layer.
 2. The bonded assembly of claim 1, whereinthe first polymer hairs have the diameter or maximum width from 0.2microns to 4 microns, the height from 0.15 microns to 2 microns, and theperiodicity from 0.4 microns to 4.5 microns.
 3. The bonded assembly ofclaim 1, wherein the first pad-level dielectric layer comprises a firstpad-level silicon-containing dielectric layer laterally surroundingportions of the first bonding pads that are proximal to the firstsubstrate, and contacting the first polymer hairs.
 4. The bondedassembly of claim 1, wherein the second pad-level dielectric layercomprises a second polymer material layer.
 5. A method of forming abonded assembly, comprising: providing a first semiconductor diecomprising a first substrate, first semiconductor devices, and firstbonding pads that are electrically connected to a respective node of thefirst semiconductor devices and laterally surrounded by a firstpad-level dielectric layer, wherein the first pad-level dielectric layercomprises a stack of a first pad-level silicon-containing dielectriclayer and a first polymer material layer including a first polymermaterial; providing a second semiconductor die comprising a secondsubstrate, second semiconductor devices, and second bonding pads thatare electrically connected to a respective node of the secondsemiconductor devices and laterally surrounded by a second pad-leveldielectric layer; and bonding the first bonding pads to the secondbonding pads while the first polymer material contacts the secondpad-level dielectric layer.
 6. The method of claim 5, further comprisingtreating a surface portion of the first polymer material layer with afirst plasma, wherein: an underlying portion of the first polymermaterial layer that is not treated with the first plasma comprises afirst proximal polymer material layer; and the surface portion of thefirst polymer material layer is converted into a first distal polymermaterial layer having at least one of a greater hydrophilicity orgreater cross-linking density than the first proximal polymer materiallayer.
 7. The method of claim 6, wherein: the first distal polymermaterial layer has the greater hydrophilicity than the first proximalpolymer material layer; the first distal polymer material layer hashigher surface energy than the first proximal polymer material layer;and the first distal polymer material layer has a smaller contact anglethan the first proximal polymer material layer.
 8. The method of claim6, wherein: the first plasma increases density of polar functionalgroups in the first polymer material; and the first proximal polymermaterial layer is essentially free of the polar function groups orincludes the polar functional groups at a density that is lower than adensity of the polar functional groups within the first distal polymermaterial layer.
 9. The method of claim 6, wherein: the first plasmaincreases a cross-linking density of the first polymer material in thefirst distal polymer material layer; and the first distal polymermaterial layer has the greater cross-linking density than the firstproximal polymer material layer.
 10. The method of claim 6, furthercomprising treating a surface portion of the second polymer materiallayer with a second plasma, wherein: an underlying portion of the secondpolymer material layer that is not treated with the second plasmacomprises a second proximal polymer material layer; the surface portionof the second polymer material layer is converted into a second distalpolymer material layer having at least one of a greater hydrophilicityor greater cross-linking density than the second proximal polymermaterial layer; and the second distal polymer material layer bonds withthe first distal polymer material layer while the second bonding padsbond with the first bonding pads.
 11. The method of claim 5, furthercomprising forming first polymer hairs by patterning a surface portionof the first polymer material layer, wherein the first polymer hairsextend from a horizontal surface of the first polymer material layer,and provide enhanced adhesion to the second pad-level dielectric layerthrough at least one of Van der Waals force or through capillaryinteraction.
 12. The method of claim 11, wherein the first polymer hairshave a diameter or maximum width from 0.1 microns to 10 microns, aheight from 0.1 microns to 5 microns, and a periodicity from 0.2 micronsto 10 microns.
 13. The method of claim 12, wherein the first polymerhairs have the diameter or maximum width from 0.2 microns to 4 microns,the height from 0.15 microns to 2 microns, and the periodicity from 0.4microns to 4.5 microns.
 14. The method of claim 11, wherein the secondpad-level dielectric layer comprises a second polymer material layer ora silicon-containing dielectric layer.
 15. The method of claim 5,further comprising: vertically recessing the first pad-level dielectriclayer which initially comprises the first pad-level silicon-containingdielectric layer relative to the first bonding pads, and forming thefirst polymer material layer on the first pad-level silicon-containingdielectric layer around the first bonding pads, such that the firstpad-level dielectric layer comprises the first polymer material layerand the first pad-level silicon-containing dielectric layer; andvertically recessing the second pad-level dielectric layer whichinitially comprises a second pad-level silicon-containing dielectriclayer relative to the second bonding pads, and forming a second polymermaterial layer on the second pad-level silicon-containing dielectriclayer around the second bonding pads, such that the second pad-leveldielectric layer comprises the second polymer material layer and thesecond pad-level silicon-containing dielectric layer.
 16. The method ofclaim 15, further comprising forming an air gap between the firstpad-level silicon-containing dielectric layer and the second pad-levelsilicon-containing dielectric layer by removing the first polymermaterial layer and the second polymer material layer after bonding thesecond bonding pads to the first bonding pads.
 17. The method of claim16, wherein: thermal decomposition temperatures of the first polymermaterial layer and the second polymer material layer are lower than anelevated temperature of an anneal process during which the secondbonding pads are bonded to the first bonding pads; and removal of thefirst polymer material layer and the second polymer material layer isperformed during the anneal process.
 18. The method of claim 5, furthercomprising: selectively forming a first self-assembled monolayer (SAM)material having a first tail group on physically exposed surfaces of thefirst bonding pads while suppressing deposition of the first SAMmaterial on the first polymer material layer; and selectively forming asecond SAM material having a second tail group on physically exposedsurfaces of the second bonding pads while suppressing deposition of thesecond SAM material on the second polymer material layer, wherein thesecond tail group has affinity to the first tail group, wherein thefirst SAM material and the second SAM material are decomposed during thebonding.
 19. A bonded assembly, comprising: a first semiconductor diecomprising a first substrate, first semiconductor devices, and firstbonding pads that are electrically connected to a respective node of thefirst semiconductor devices and laterally surrounded by a firstpad-level dielectric layer, wherein the first pad-level dielectric layercomprises a first distal surface that is more proximal to the firstsubstrate than distal surfaces of the first bonding pads are to thefirst substrate; and a second semiconductor die comprising a secondsubstrate, second semiconductor devices, and second bonding pads thatare electrically connected to a respective node of the secondsemiconductor devices and laterally surrounded by a second pad-leveldielectric layer, wherein each of the second bonding pads is bonded to arespective one of the first bonding pads, the second pad-leveldielectric layer comprises a second distal surface that is more proximalto the second substrate than distal surfaces of the second bonding padsare to the second substrate, wherein an air gap is present between thefirst pad-level dielectric material layer and the second pad-leveldielectric layer, and the air gap laterally surrounds each bonded pairof the first bonding pad and second bonding pad.
 20. The bonded assemblyof claim 19, wherein: each of the first bonding pads and the secondbonding pads comprises a respective metallic barrier liner including arespective metallic nitride material and a respective metallic fillmaterial portion laterally surrounded by the respective metallic barrierliner; and each of the metallic barrier liners comprises a respectiveouter sidewall that includes a distal segment that is physically exposedto the air gap and a proximal segment that contacts one of the firstpad-level dielectric layer and the second pad-level dielectric layer.